Direct printing of lead zirconate titanate thin films for microelectromechanical systems

Advances in piezoelectric PZT-based RF MEMS components and systems

“…PZT can be patterned using ion milling, wet etching, reac tive ion etching [32], ink jet printing [33], micromolding [34] and microcontact printing [35], with the latter three being specifically for patterning CSD films. A typical fabrication process (like the one used in the Specialty Electronic Materials and Sensors Cleanroom Facility at the U.S. Army Research Laboratory (ARL), Adelphi, MD) starts with a choice of sub strate (high resistivity Si or SOI) and an elastic layer (SiO 2 , Si device layer, or SiO 2 /Si 3 N 4 composite).…”

Inkjet‐Printed Piezoelectric Thin Films for Transparent Haptics

“…CSD processing can be used as a basis for inkjet printing of oxide piezoelectrics. [17][18][19][20] The main differences are the rheological conditions of the solutions and inks, which are used for spin-coating and inkjet printing, respectively. For the latter, properties of the inks can be analyzed using the dimensionless parameter Z [21]…”

“…[22] While PZT thin films have been inkjet printed before, their integration into actuator applications has not yet been realized. [17][18][19][20]23] In this paper we demonstrate the use of inkjet printing to deposit PZT thin films on fused silica glass substrates for the fabrication of a transparent haptic slider device. To transform a CSD spin-coating solution into an inkjet-printable ink, we added 1,3-propanediol (η = 52 mPa s and boiling point of 213 °C) as cosolvent.…”

A reel-to-reel compatible printed accelerometer

“…Passive fluidic micromixers have been printed onto plastic transparencies using both laser printing [4] and wax transfer printing [5]. Inkjet printing has been used to directly pattern and deposit conductors, dielectrics, and piezoelectric materials for MEMS device fabrication [6] The fabrication technique discussed here builds on work using laser print patterned polystyrene MEMS devices [7], laser-printed layers for etch masking [8] and fabrication using micromilled plastics [9]. These…”