Direct writing of metal film via sputtering of micromachined electrodes

Abdul-Wahed, Ahmed M.; Roy, Anindya; Xiao, Zhiming; Takahata, Kenichi

doi:10.1016/j.jmatprotec.2018.06.028

Cited by 9 publications

(4 citation statements)

References 15 publications

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“…Therefore, a method to create dielectric films from DC sputtered aluminum shaped into a wire was developed. Previous microsputtering studies have used compressed dry air or argon as the sputtering gas; [43][44][45][46][47][48] while these are sufficient to sputter materials such as gold and copper, they cannot sputter aluminum, as aluminum needs more energetic ions to strip the aluminum atoms from the target wire. Increasing the ion energy by increasing the power fed to the plasma is not a viable solution, as the high current can melt the thin target wire.…”

Section: Gas MIX Formulation For Increasing Sputtering Yield and Crea...mentioning

confidence: 99%

Fully 3D‐Printed, Ultrathin Capacitors via Multi‐Material Microsputtering

Kornbluth

Parameswaran

Mathews

et al. 2022

Adv Materials Technologies

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This study reports the first fully additively manufactured capacitors as a proof‐of‐concept demonstration of direct‐write, ultrathin‐film electronic components made via multi‐material microplasma sputtering. This is also the first demonstration of a cleanroom‐quality, multi‐material electrical device produced entirely through additive manufacturing. Ultrathin metal and dielectric films are deposited at <80 °C and atmospheric pressure conditions on a substrate using a novel, continuously fed, dual target microsputtering printhead. The conductive films are created by sputtering gold in an air atmosphere and shown to attain near‐bulk electrical resistivity. The dielectric films are created by sputtering aluminum in a gas blend of argon and air; the aluminum oxidizes in the high‐energy, high‐collisionality plasma, forming alumina nanoparticles that are deposited on the substrate. Ultra‐thin (35 nm) alumina films showed extremely high resistivity (100 GΩ‐m) and dielectric strength (6.2 GV m−1). Also, the frequency response of the capacitor is satisfactorily described by the universal dielectric response typically found in heterogenous dielectrics. It is hypothesized that the dielectric response is the result of the presence of condensed water in the pores of the alumina film.

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Section: Gas MIX Formulation For Increasing Sputtering Yield and Crea...mentioning

confidence: 99%

Fully 3D‐Printed, Ultrathin Capacitors via Multi‐Material Microsputtering

Kornbluth

Parameswaran

Mathews

et al. 2022

Adv Materials Technologies

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“…Sputtering is normally conducted in vacuum; however, plasmas can be stable at atmospheric pressure if the interelectrode distance is reduced to millimeters or less-these plasmas are called microplasmas. Microplasma sputtering (μPS) (Figure 1f ) is a relatively new technology for metal 3D printing of micro-and nanosystems that can deposit metal at room temperature on a wide range of materials, including temperature-sensitive substrates (99)(100)(101)(102)(103)(104)(105). There is an experimental DED technique that uses an arc plasma as an integrating agent, known as plasma-arc directed energy deposition (DED-PA), but it produces large structures with low precision, resolution, and surface quality (19); instead, μPS uses a low-current glow discharge for finer process control.…”

Section: Microplasma Sputteringmentioning

confidence: 99%

“…Because μPS does not use binder, it creates imprints with near-bulk electrical conductivity without annealing (∼85% bulk value for gold), surpassing competing technologies such as electrohydrodynamic deposition (jetting of metal micro/nanoparticle solutions using high electric fields; see 106-108), laser-assisted electrophoretic deposition (creation of deposits via electrophoresis of metal micro-and nanoparticles confined by high-intensity photons; see 109), laser-induced forward transfer (direct transfer by laser ablation of materials sourced as a thin film on a transparent substrate; see 110, 111), meniscus-confined electroplating (see 112,113), laser-induced photoreduction (photochemical reduction of metal salt solutions using a rastering laser; see [114][115][116], and focused-ion-beam-induced deposition (deposition of metallic molecules from the ion-induced dissociation of gases; see 117, 118) (Table 2). In principle, many materials can be sputtered, but the reported μPS work focuses on gold and copper (see [99][100][101][102][103][104]. Because of the slow speed of the process, μPS is primarily used for metallic coatings, rather than metal objects, which can be used to integrate metal traces to the surfaces of free-form objects, for example, to implement skin electronics.…”

Section: Microplasma Sputteringmentioning

confidence: 99%

Biomedical Applications of Metal 3D Printing

Velásquez–García

Kornbluth

2021

Annu. Rev. Biomed. Eng.

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Additive manufacturing's attributes include print customization, low per-unit cost for small- to mid-batch production, seamless interfacing with mainstream medical 3D imaging techniques, and feasibility to create free-form objects in materials that are biocompatible and biodegradable. Consequently, additive manufacturing is apposite for a wide range of biomedical applications including custom biocompatible implants that mimic the mechanical response of bone, biodegradable scaffolds with engineered degradation rate, medical surgical tools, and biomedical instrumentation. This review surveys the materials, 3D printing methods and technologies, and biomedical applications of metal 3D printing, providing a historical perspective while focusing on the state of the art. It then identifies a number of exciting directions of future growth: ( a) the improvement of mainstream additive manufacturing methods and associated feedstock; ( b) the exploration of mature, less utilized metal 3D printing techniques; ( c) the optimization of additively manufactured load-bearing structures via artificial intelligence; and ( d) the creation of monolithic, multimaterial, finely featured, multifunctional implants.

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“…At present, the micro/nano 3D printing technologies developed mainly include: direct laser writing based on two-photon polymerization [6], micro-stereophotolithography, electrohydrodynamic jet (E-jet) printing [7], laser-induced forward transfer (LIFT) [8], focused electron beam (FEB) induced deposition [9], electrochemical deposition [10], focused-ion-beam direct writing (FIBDW) [11], and microplasma deposition [12][13][14]. The printing scales include micron scales, sub-micron scales, and nano scales.…”

Section: Introductionmentioning

confidence: 99%

Experimental Analysis of Wax Micro-Droplet 3D Printing Based on a High-Voltage Electric Field-Driven Jet Deposition Technology

Chao

Cao

et al. 2022

Crystals

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High-voltage electric field-driven jet deposition technology is a novel high resolution micro scale 3D printing method. In this paper, a novel micro 3D printing method is proposed to fabricate wax micro-structures. The mechanism of the Taylor cone generation and droplet eject deposition was analyzed, and a high-voltage electric field-driven jet printing experimental system was developed based on the principle of forming. The effects of process parameters, such as pulse voltages, gas pressures, pulse width, pulse frequency, and movement velocity, on wax printing were investigated. The experimental results show that the increasing of pulse width and duration of pulse high voltage increased at the same pulse frequency, resulting in the micro-droplet diameter being increased. The deposited droplet underwent a process of spreading, shrinking, and solidifying. The local remelting and bonding were acquired between the contact surfaces of the adjacent deposited droplets. According to the experiment results, a horizontal line and a vertical micro-column were fabricated by adjusting the process parameters; their size deviation was controlled within 2%. This research shows that it is feasible to fabricate the micro-scale wax structure using high-voltage electric field-driven jet deposition technology.

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Direct writing of metal film via sputtering of micromachined electrodes

Cited by 9 publications

References 15 publications

Fully 3D‐Printed, Ultrathin Capacitors via Multi‐Material Microsputtering

Fully 3D‐Printed, Ultrathin Capacitors via Multi‐Material Microsputtering

Biomedical Applications of Metal 3D Printing

Experimental Analysis of Wax Micro-Droplet 3D Printing Based on a High-Voltage Electric Field-Driven Jet Deposition Technology

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