“…Recently, resistive switching random access memory (RRAM) has been specified as one of the most progressive next generation nonvolatile memories to replace 3D flash due to its simple metal-insulator-metal structure, complementary metal-oxide-semiconductor (CMOS) compatibility, low power consumption, better uniformity, strong data retention, long endurance, and easier fabrication with low cost 1 – 4 . The RRAM devices with several high-κ materials such as Ta 2 O 5 5 , 6 , HfO x 7 , 8 , TiO 2 9 , BaTiO 3 10 have been reported by several groups. Along with these different oxides, the GeO x material has profound potential to execute resistive switching owing to its compatibility with back-end-of-line (BOEL) process in CMOS technology, capability of producing oxygen vacancy at low temperature 11 , widely spanned dielectric constant values (k~12–15) 12 , large band gap (E g ~4.3–5.9 eV) 13 , 14 , and good thermal stability 15 , 16 .…”