2015
DOI: 10.1002/pssr.201409531
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Dynamic moderation of an electric field using a SiO2 switching layer in TaOx ‐based ReRAM

Abstract: ReRAMs using oxygen vacancy drift in their resistive switching are promising candidates as next generation memory devices. One remaining issue is degradation of the on/off ratio down to 102 or less with an increased number of switching cycles. Such degradation is caused by a local hard breakdown in a set process due to a very high electric field formed just before the completion of a conductive filament formation. We found that introducing an ultra‐thin SiO2 layer prevents the hard breakdown by dynamical moder… Show more

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Cited by 9 publications
(13 citation statements)
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“…62 A combination of a solid electrolyte with high levels of Cu inclusions and an oxide with reduced solubility is thought to be most effective. Similar double layer structures were also used for VCM-type ReRAMs, [72][73][74] where the oxygen vacancies form the CF. Kudo et al investigated a miniaturized Cu-Te/insulator device using in situ TEM, and claimed the formation of Cu filament on a nanometre scale.…”
Section: Discussionmentioning
confidence: 99%
“…62 A combination of a solid electrolyte with high levels of Cu inclusions and an oxide with reduced solubility is thought to be most effective. Similar double layer structures were also used for VCM-type ReRAMs, [72][73][74] where the oxygen vacancies form the CF. Kudo et al investigated a miniaturized Cu-Te/insulator device using in situ TEM, and claimed the formation of Cu filament on a nanometre scale.…”
Section: Discussionmentioning
confidence: 99%
“…Recently, resistive switching random access memory (RRAM) has been specified as one of the most progressive next generation nonvolatile memories to replace 3D flash due to its simple metal-insulator-metal structure, complementary metal-oxide-semiconductor (CMOS) compatibility, low power consumption, better uniformity, strong data retention, long endurance, and easier fabrication with low cost 1 4 . The RRAM devices with several high-κ materials such as Ta 2 O 5 5 , 6 , HfO x 7 , 8 , TiO 2 9 , BaTiO 3 10 have been reported by several groups. Along with these different oxides, the GeO x material has profound potential to execute resistive switching owing to its compatibility with back-end-of-line (BOEL) process in CMOS technology, capability of producing oxygen vacancy at low temperature 11 , widely spanned dielectric constant values (k~12–15) 12 , large band gap (E g ~4.3–5.9 eV) 13 , 14 , and good thermal stability 15 , 16 .…”
Section: Introductionmentioning
confidence: 99%
“…Unlike conventional resistive switching in other resistive switching devices 31 , the device in this work did not need a forming process and the resistive switching is recoverable. The switching time from the ON state to the OFF state can be controlled by the compliance current.…”
Section: Introductionmentioning
confidence: 99%
“…In this work, Pt/Ta 2 O 5−x /W structured devices were investigated in a vertical architecture that is much desired in high density integration 24 30 , which makes the hardware implementation of neuromorphic networks with a comparable number of devices as human’s synapse number possible, and resistive switching properties in Pt/Ta 2 O 5 junctions in a forward potential applying to Pt was discovered. Unlike conventional resistive switching in other resistive switching devices 31 , the device in this work did not need a forming process and the resistive switching is recoverable. The switching time from the ON state to the OFF state can be controlled by the compliance current.…”
Section: Introductionmentioning
confidence: 99%