Herein, the results are reviewed concerning reliability of highâelectron mobility transistors (HEMTs) based on GaN, which currently represent the technology of choice for highâefficiency microwave and millimeterâwave power amplifiers. Several failure mechanisms of these devices are extensively studied, including converse piezoelectric effects, formation of conductive percolation paths at the edge of gate toward the drain, surface oxidation of GaN, timeâdependent breakdown of GaN buffer, and of fieldâplate dielectric. For GaN HEMTs with scaled gate length, the simultaneous control of shortâchannel effects, deepâlevel dispersion, and hotâelectronâinduced degradation requires a careful optimization of epitaxial material quality and device design.