“…This has attracted much research interest from various application fields, including lubricative or protective coating, electromagnetic wave shielding, sensors, and biology. , In addition, advances in deposition techniques, such as high-power impulse magneto sputtering (HiPIMS), − electron cyclotron resonance sputtering, and unbalanced magnetron sputtering, have facilitated the synthesis of diverse carbon nanostructures, providing greater opportunities for carbon-based applications. In particular, the need for ultrathin a-C coating layers has increased rapidly. ,, However, apart from a few cases, the most reported a-C films have sub-micron thickness, and the spatial resolution of the measurements is limited to a size larger than the carbon nanostructure. ,, Thus, comprehensive and systematic studies on the electrical, mechanical, tribological, and chemical features of ultrathin a-C layers are lacking.…”