Effect of temperature on pull-in voltage and natural frequency of an electrostatically actuated microplate

Talebian, Soheil; Rezazadeh, Ghader; Fathalilou, Mohammad; Toosi, Behrooz

doi:10.1016/j.mechatronics.2010.07.009

Cited by 64 publications

(38 citation statements)

References 20 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Based on the Mindlin plate theory, the displacement field is expressed by (17) where is displacement along the coordinate direction; , and are rotation angles and transverse displacement of a point on the mid-plane. The preceding relations can be presented as (18) in which symbolizes the displacement vector and denotes the augmented displacement vector.…”

Section: Plate Modelmentioning

confidence: 99%

“…Therefore, different characteristics of these microstructures, especially their mechanical behavior, have been the focus of significant research. In this regard, classic continuum models have been used in different research works to analyze the mechanical problems of microbeams and microplates (e.g., free vibration and buckling in both linear and nonlinear regimes) [11][12][13][14][15][16][17][18][19][20][21].…”

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Triangular Mindlin microplate element

Ansari

Shojaei

Mohammadi

et al. 2015

Computer Methods in Applied Mechanics and Engineering

View full text Add to dashboard Cite

Section: Plate Modelmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Triangular Mindlin microplate element

Ansari

Shojaei

Mohammadi

et al. 2015

Computer Methods in Applied Mechanics and Engineering

View full text Add to dashboard Cite

“…Assuming the temperature distribution is uniform for micro scale structures, 25 the radial thermal stress of the membrane with the same thermal expansion coefficient (TEC) as the substrate can be given by:…”

Section: Effect Of Ambient Temperaturementioning

confidence: 99%

“…The temperature difference causes thermal stress in the membrane, which finally leads to a resonant frequency shift of the membrane. 25 To eliminate the temperature effect, two identical CMUTs subjected to different bias voltages can be used to achieve different pressure and temperature sensitivities. Figure 6 shows a study of the temperature effect on the resonant frequency of the example CMUT membrane under different pressures with a fixed bias voltage, in which the reference temperature is 20…”

Section: Effect Of Ambient Temperaturementioning

confidence: 99%

Capacitive micromachined ultrasonic transducer for ultra-low pressure measurement: Theoretical study

Zhao

Jiang

et al. 2015

AIP Advances

View full text Add to dashboard Cite

Ultra-low pressure measurement is necessary in many areas, such as high-vacuum environment monitoring, process control and biomedical applications. This paper presents a novel approach for ultra-low pressure measurement where capacitive micromachined ultrasonic transducers (CMUTs) are used as the sensing elements. The working principle is based on the resonant frequency shift of the membrane under the applied pressure. The membranes of the biased CMUTs can produce a larger resonant frequency shift than the diaphragms with no DC bias in the state-of-the-art resonant pressure sensors, which contributes to pressure sensitivity improvement. The theoretical analysis and finite element method (FEM) simulation were employed to study the relationship between the resonant frequency and the pressure. The results demonstrated excellent capability of the CMUTs for ultra-low pressure measurement. It is shown that the resonant frequency of the CMUT varies linearly with the applied pressure. A sensitivity of more than 6.33 ppm/Pa (68 kHz/kPa) was obtained within a pressure range of 0 to 100 Pa when the CMUTs were biased at a DC voltage of 90% of the collapse voltage. It was also demonstrated that the pressure sensitivity can be adjusted by the DC bias voltage. In addition, the effects of air damping and ambient temperature on the resonant frequency were also studied. The effect of air damping is negligible for the pressures below 1000 Pa. To eliminate the temperature effect on the resonant frequency, a temperature compensating method was proposed.

show abstract

“…The effect of temperature change on the pull-in voltage and natural frequency of an electrostatically actuated microplate is presented in Ref. [23]. the effect of DC voltage and temperature change on the mechanical behavior of functionally graded material micro-tweezers is studied in Ref.…”

Section: Introductionmentioning

confidence: 99%