2015
DOI: 10.1063/1.4939217
|View full text |Cite
|
Sign up to set email alerts
|

Capacitive micromachined ultrasonic transducer for ultra-low pressure measurement: Theoretical study

Abstract: Ultra-low pressure measurement is necessary in many areas, such as high-vacuum environment monitoring, process control and biomedical applications. This paper presents a novel approach for ultra-low pressure measurement where capacitive micromachined ultrasonic transducers (CMUTs) are used as the sensing elements. The working principle is based on the resonant frequency shift of the membrane under the applied pressure. The membranes of the biased CMUTs can produce a larger resonant frequency shift than the dia… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
4
1

Citation Types

0
8
0

Year Published

2019
2019
2022
2022

Publication Types

Select...
8

Relationship

0
8

Authors

Journals

citations
Cited by 10 publications
(8 citation statements)
references
References 24 publications
0
8
0
Order By: Relevance
“…In the ADAS, the ultrasonic sensor is commonly used for parking in small parking spaces and emergency braking at the low speed [37]. Figure 6 shows the workings of an ultrasonic sensor in different electromagnetic spectrum bands [38].…”
Section: Ultrasonic Sensors/usmentioning
confidence: 99%
“…In the ADAS, the ultrasonic sensor is commonly used for parking in small parking spaces and emergency braking at the low speed [37]. Figure 6 shows the workings of an ultrasonic sensor in different electromagnetic spectrum bands [38].…”
Section: Ultrasonic Sensors/usmentioning
confidence: 99%
“…4 The diligent research in static and vibrational characteristics of MNEMS plates of circular shape is very beneficial for various actuators and sensors. 5,6…”
Section: Introductionmentioning
confidence: 99%
“…They reduced the partial differential equations of motion of the plate to a set of ordinary differential equations using Galerkin based reduced-order model technique. The dynamic characteristics of an axisymmetric circular plate under electrostatic load and uniform transverse pressure were investigated by Li et al 5,12 They provided an approximate solution to study the effect of both electrostatic force and external pressure on the natural frequency and sensitivity of clamped circular microplates with the help of the energy equivalent method. Lin et al 13 thoroughly studied surface effects and Casimir force on the static and dynamic behaviour of clamped electrostatically actuated circular nanoplates.…”
Section: Introductionmentioning
confidence: 99%
See 1 more Smart Citation
“…Further research was carried out by the team, and the results verified that the resonance frequency has a linear relationship with the pressure under the action of the bias voltage, and the air damping effect could be negligible. In addition, a temperature compensation method was proposed to eliminate the negative influence of the external ambient temperature [20]. Zhang et al [21] developed a CMUT array which featured a sensitivity of 50.57 Hz/kPa in the pressure range of 0-10 kPa and 441.08 Hz/kPa in the pressure range of 20-101 kPa.…”
Section: Introductionmentioning
confidence: 99%