Effects of ion bombardment on properties of d.c. sputtered superhard (Ti, Si, Al)N nanocomposite coatings

Abstract

Si N. The mixture of the metastable phase with nanocomposite coating phases in some samples indicates that, in general, the 3 4 segregation of TiN and SiN phases is not complete. Hardness values as high as 45 GPa were measured. Small Si additions to x (Ti, Al)N coatings induce a reduction in the pin-on-disk sliding wear rate.

Characterization of TiAlSiON coatings deposited by plasma enhanced magnetron sputtering: XRD, XPS, and DFT studies

“…An increase in the coatings hardness from 31 to 45 GPa has been observed earlier at the ion/atom arrival ratio fluxes changing from 2.5 to 4 in the DC mode [19]. Enhancement of mechanical properties can be explained by an increase in the species mobility in the growing film thus leading to a better phase segregation.…”

“…Enhancement of mechanical properties can be explained by an increase in the species mobility in the growing film thus leading to a better phase segregation. Unlike [19], in the present work the coatings were deposited at a constant value of the mean ion current density, and the increasing pulse ion current density appears to be the most probable reason for the hardness growth. The peak with the maximum at 2θ~33.2° can be attributed to AlN phase with (100) texture [20].…”

Nanocomposite Coatings: Preparation, Characterization, Properties, and Applications

“…This method is used generally for producing of the I/I nanocomposite coating [41][42][43][44][45][92][93][94][95][96][97], which includes the inorganic matrices and inorganic nanoparticles. For these coatings, PVD method includes the following: laser ablation [98], thermal evaporation [99], ion beam deposition [100], ion implantation [101,102], laser-assisted deposition [103], and atom beam cosputtering technique.…”

Plasma assisted techniques for deposition of superhard nanocomposite coatings

“…Ribeiro and co-workers [99] deposited Ti-Al-Si-N coatings on high-speed steel substrates by DC reactive sputtering with the aim to understand the evolution of the mechanical properties as a function of different magnetic fields at the substrate position, which allowed the variation of the ion/atom ratio of the particle flux arriving at the substrate surface. A significant density increase of the coatings was observed in the presence of the external magnetic field.…”