Effects of Pb(Zn1∕3Nb2∕3)O3 addition and postannealing temperature on the electrical properties of Pb(ZrxTi1−x)O3 thick films prepared by aerosol deposition method

Abstract

Effects of the lead zinc niobate (PZN) addition and postannealing temperature on the electrical properties of the lead zirconate titanate (PZT) films were observed to improve electrical properties of the PZT film. The PZN content was varied from 0% to 40%, and the postannealing temperature was varied from 500to900°C. The as-deposited film had a fairly dense microstructure without any cracking and showed a single perovskite phase formed with nanosized grains. Meanwhile, rapid grain growth was observed when the postannealing temperature was increased from 700to900°C. The PZN-added PZT film showed poorer electrical properties than the pure PZT film did when the films were annealed at 700°C but higher remnant polarization, dielectric constant, and piezoelectric response when the films were annealed at 900°C. Remnant polarization value, relative dielectric constant, and piezoelectric constant of the 20% PZN-added PZT films annealed at 900°C were 50.0μC∕cm2, 1643, and 200pC∕N, respectively, which are values sufficiently high to be comparable with the bulk specimen sintered at 1200°C.

Preparation and characterization of piezoelectric ceramic–polymer composite thick films by aerosol deposition for sensor application

“…The as-deposited films showed weak hysteresis behavior with a remnant polarization value (P r ) < 1 C/cm 2 , regardless of the PVDF contents. This is similar to the value reported for a film deposited with the ceramic powder without an organic content [10,14]. The poor ferroelectric characteristics appear to originate not only from the small grain size but also from defects or crystallographic distortion caused by fracture with high energy during deposition, which restrict the domain movement.…”

Dense Nanostructured Hydroxyapatite Coating on Titanium by Aerosol Deposition

“…Like other ceramic coatings fabricated by aerosol deposition, 13,15 HAp coating in the current study had dense microstructure. That is well compared with HAp coating prepared by plasma spraying that often created cracks and pores in the microstructure 16 .…”

Piezoelectric films for high frequency ultrasonic transducers in biomedical applications

“…The total intrinsic stress stored in the film increases with increasing the film thickness. Park and his co-workers [101] had demonstrated the delamination of the PZT-based films with thickness above 20 μm by AD and subsequent post-annealing process. Introduction of fine pores within the film was proposed for relieving the intrinsic residual stress.…”