“…Investigation of deformations and strain fields in silicon matrix structures embedded with vertically stacked Ge(Si) self-assembled islands D. A. Pavlov, 1,a) A. I. Bobrov, 1 A. V. Novikov, 2 D. S. Sorokin, 1 N. V. Malekhonova, 1 A. V. Pirogov, 1 D. E. Nikolitchev, 1 The information on the distribution of distortions and strains in GeSi heteronanosystems is fundamentally important for their design and creation. Studies in this field use a number of techniques, [1][2][3][4][5][6][7][8][9] among which one of the most informative is the cross-section high resolution transmission electron microscopy (HRTEM).…”