Effects of substrate temperature on the Cu2ZnSnS4 films deposited by radio-frequency sputtering with single target

A Status Review on Cu2ZnSn(S, Se)4-Based Thin-Film Solar Cells

“…Feng et al fabricated a CZTS photovoltaic device using a cosputtering technique followed by two-step treatment and reported better energy conversion efficiency of 5.85% with higher hole concentration and lower defect density than conventional CZTS device with one-step annealing [34]. Scragg [38]. They investigated that the increase of substrate temperature caused a significant reduction of sulfur content, an increment of the copper content in the as-grown films, and a decrease in strain and dislocation density in the deposited films.…”

Control of composition and properties by the use of reflector wall in RF sputter deposition of Cu2ZnSnS4 thin films

“…The theoretical solar conversion efficiency of CZTS-based solar cells is estimated to be 32% [2]. Several types of deposition techniques for CZTS thin films have been investigated, including a combination of sputtering of precursor layers and post-deposition sulfurization [3][4][5][6][7][8], reactive sputtering [9,10], sputtering using a quaternary target or mixed compound target [11][12][13][14][15][16][17][18], pulsed-laser deposition [19], thermal evaporation [20], spray pyrolysis [21,22], electro-deposition [23], and chemical solution-based synthesis [24].…”

Pure sulfide kesterite solar cells with cation substituted absorber and back contact intermediate layer

“…The higher energy leads to better rearrangement the during deposition process and, hence, better film quality. Jheng et al reported a one-stage fabrication method of CZTS thin films using single target sputtering approach [84]. The substrate temperature was kept at 50°C, 100°C, 150°C and 200°C during the deposition processes.…”

“…CdS thin films are widely used as a buffer layer in CZTS-based solar cells to form a heterojunction [84,157]. However, the carrier recombination at the interface between CZTS absorber and CdS buffer results in a decrease of Voc.…”

“…In addition, minor peaks observed at 18.3°, 33° and 56.2° are attributed to the ( 101), ( 200) and (312) diffractive planes of CZTS, respectively. Crystallites size corresponding to the planes was calculated using Scherrer's equation [84] and presented in Fig. 3.5b.…”