Efficient Low-Loss Adaptive Optical Filters Based on Silicon Oxycarbide - Liquid Crystal Hybrid Technology

Baudzus, Lars; Krummrich, Peter M.

doi:10.1364/ofc.2019.th2a.3

Cited by 2 publications

(3 citation statements)

References 5 publications

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“…A low surface roughness over the complete refractive index range was measured by AFM. These findings make PECVD SiOC an ideal material for hybrid technologies [20] in which optical waveguides need to have a specific refractive index for example to prevent reflections at interfaces or enable low coupling losses. This study created a basis for future work which should focus on the realization of optical devices benefiting from this versatile waveguide material.…”

Section: Discussionmentioning

confidence: 99%

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Low-loss planar optical waveguides based on plasma deposited silicon oxycarbide

Baudzus¹,

Krummrich²

2019

Opt. Mater. Express

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Silicon oxycarbide deposited by plasma enhanced chemical vapor deposition is investigated regarding its application as a material for optical waveguides. The dependence of the infrared absorption, the refractive index, and the surface roughness on the precursor gas flow ratios is studied by Fourier transform infrared spectroscopy, ellipsometry, and atomic force microscopy, respectively. Results show that the refractive index can be tuned over a significant wider range compared to silicon oxynitride. Fabricated waveguides with a refractive index contrast of 0.05 show waveguide attenuation from about 0.3 dB/cm to 0.4 dB/cm for wavelengths between 1480 nm and 1570 nm. These low values were achieved without using a high temperature annealing process.

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Section: Discussionmentioning

confidence: 99%

“…When solely SiH 4 and CO 2 are used the refractive can be as low as 1.47. refractive indices of SiO 2 and SiC. This feature enables application tailored waveguide designs which is especially important in hybrid technologies [20].…”

Section: Optical Properties and Deposition Parametersmentioning

confidence: 99%

Low-loss planar optical waveguides based on plasma deposited silicon oxycarbide

Baudzus¹,

Krummrich²

2019

Opt. Mater. Express

Self Cite

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“…It has optical characteristics and has found major applications in different fields of technologies to become an enabling material in the field of photonic integrated circuits. These application includes lithium-ion batteries [8], light emitters [9], filters [10], interlayer dielectrics [11], and [12], photoluminescence [13], Plasmonics [14] and others [15], and [16]. The most enabling characteristic of SiOC is that it has a widely tunable refractive index that ranges from 1.45 to 3.2 [17], and [18].…”

Section: Introductionmentioning

confidence: 99%

Simulation of Silicon Oxycarbide Waveguides for Shorter Band Photonics

Daudpota

2022

SSURJET

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In this research paper, we design and simulate Silicon Oxycarbide (SiOC) channel waveguides and photonic passive device such as directional coupler. SiOC channel waveguides are designed for different values of width and height at shorter wavelength band that is 1310 nm wavelength window with refractive index of SiOC (ncore) =2.2 μm and SiO2 (nclad) = 1.444 μm. TE and TM fundamental mode is achieved at width = 1.5 microns and height = 0.5 microns to understand the single mode operation of SiOC channel waveguides. The minimum bending radius of SiOC waveguide is found to be 30 microns that is large enough to integrate the large scale devices. Directional coupler is designed to measure the coupling power between waveguides with gap 0.6, 0.7 and 0.8 microns that gives the 3dB coupling at 20, 40 and 100 microns. In this research, silicon oxycarbide is presented as potential material platform for the highly efficient photonic devices.

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Efficient Low-Loss Adaptive Optical Filters Based on Silicon Oxycarbide - Liquid Crystal Hybrid Technology

Cited by 2 publications

References 5 publications

Low-loss planar optical waveguides based on plasma deposited silicon oxycarbide

Low-loss planar optical waveguides based on plasma deposited silicon oxycarbide

Simulation of Silicon Oxycarbide Waveguides for Shorter Band Photonics

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