The scattering potential for the acoustic deformation potential scattering in a one-dimensional silicon quantum dot array interconnected by thin oxide layers is theoretically investigated. One-dimensional phonon normal modes are numerically obtained using the linear atomic chain model. The strain caused by an acoustic-phonon vibration is absorbed by the oxide layers, resulting in the reduction of the strain in the Si dots. This effect eventually leads to ϳ40% reduction of the scattering potential all over the structure. The amount of the reduction does not depend on the phonon energy, but rather on the ratio of the Si dot size to the oxide thickness.