Electron collision cross sections for the TMS molecule and electron transport coefficients in TMS-Ar and TMS-O2 mixtures

Analysis of Electron Transport Coefficients in Binary Mixtures of TEOS Gas with Kr, Xe, He and Ne Gases for Using in Plasma Assisted Thin-film Deposition

“…The present two-term approximation of the Boltzmann equation for the energy given by Tagashira et al [12] was also previously used for the pure gases and binary mixture gases [4][5][6][7][8][9]. The centre-of-mass drift velocity of an electron swarm (W r ) and the longitudinal diffusion coefficient (D L ) are calculated in the time-of-flight (TOF) parameters.…”

“…The diffusion-corrected ionization and attachment coefficients are also calculated in the steady state Townsend (SST) parameters. A description of the Boltzmann equation analysis in the previous publications [4][5][6][7][8][9][12][13][14][15][16] is also briefly following represented. The electron transport coefficients in given gases are functions only of the ratio E/N, the gas temperature T, and when a magnetic field is present, of B/N.…”

“…We used the electron swarm method to determine a set of accurate electron collision cross sections for TEOS, TMS, and BF 3 molecules [4,6,7]. The two-term approximation of the Boltzmann equation for the energy has been applied to calculate the electron transport coefficients in pure gases and binary mixture gases such as electron drift velocity, density-normalized longitudinal diffusion coefficient, ratio of longitudinal diffusion coefficient to electron mobility, Townsend first ionization coefficient over the wide E/N range.…”

Calculation and analysis of electron transport coefficients in BF3-N2 and TMS-N2 gas mixtures

“…Therefore, using the reliable sets of electron collision cross section are necessary for obtaining the accuracy electron transport coefficients. The electron collision cross section set for TMS molecule determined by Hien et al [12], BF 3 molecule determined by Hien et al [11] and N 2 molecule determined by Nakamura [15], were used in this study. The validity of these sets has been proven in [11], [12], [15].…”

“…The electron collision cross section set for TMS molecule [12] includes one momentum transfer cross section, two vibrational excitation cross sections (threshold energies of 0.15 eV and 0.21 eV), one electronic excitation cross section (threshold energy of 6.5 eV), one dissociative attachment cross section (threshold energy of 3.05 eV) and one ionization cross section (threshold energy of 9.8 eV). The electron collision cross section set for BF 3 molecule [11] includes one momentum transfer cross section, five vibrational excitation cross sections (threshold energies of 0.11, 0.086, 0.18, 0.059 and 1.1 eV), one electronic excitation cross section (threshold energy of 6.5 eV), one dissociative attachment cross sections (threshold energy of 10.1 eV), two dissociation excitation cross sections (threshold energy of 6.48 eV and 11.2 eV) and one ionization cross section (threshold energy of 15.95 eV).…”