1993
DOI: 10.1016/0257-8972(93)90139-f
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Electron cyclotron resonance plasma deposition of cubic boron nitride using N-trimethylborazine

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Cited by 54 publications
(10 citation statements)
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“…Larger particles with a diameter greater than 100 nm are used as a contrast agent for magnetic resonance imaging of the gastrointestinal tract, while smaller particles, below ~ 20 nm, are used as carriers for tumor treatments. For clinical application of cobalt ferrite nanoparticles, it is very important to investigate the biosafety both in vivo and in vitro [ 6 , 7 ]. Many nanoparticles taken via oral or intravenously into the body are mainly distributed in the liver, kidney, and lung so as to lead to various inflammations in these organs.…”
Section: Introductionmentioning
confidence: 99%
“…Larger particles with a diameter greater than 100 nm are used as a contrast agent for magnetic resonance imaging of the gastrointestinal tract, while smaller particles, below ~ 20 nm, are used as carriers for tumor treatments. For clinical application of cobalt ferrite nanoparticles, it is very important to investigate the biosafety both in vivo and in vitro [ 6 , 7 ]. Many nanoparticles taken via oral or intravenously into the body are mainly distributed in the liver, kidney, and lung so as to lead to various inflammations in these organs.…”
Section: Introductionmentioning
confidence: 99%
“…Such demands have stimulated much interest in the deposition of cubic boron nitride (c-BN) films through PVD and CVD techniques due to the outstanding properties of this material [1][2][3][4][5][6][7][8].…”
Section: Introductionmentioning
confidence: 99%
“…On the other hand, CVD growth on nondiamond substrates (e.g., Si, SiC, and Ir) has provided highly oriented diamond over large areas . Although cBN synthesis employing low pressure methods including CVD and physical vapor deposition (PVD) started historically at the same time, the cBN film quality lags far behind that of diamond and cBN has not been implemented into practice so far. A part of the problem is associated with the deposition techniques themselves. Unlike CVD diamond growth, the cBN deposition methods are ion-assisted.…”
Section: Introductionmentioning
confidence: 99%