2005
DOI: 10.1063/1.1924893
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Electron tunneling spectroscopy study of traps in high-k gate dielectrics: Determination of physical locations and energy levels of traps

Abstract: It will be demonstrated that the electron tunneling spectroscopy (ETS), obtained by taking the second derivative of the current-voltage (I–V) characteristic of a tunnel barrier, is an effective technique to probe traps in ultra-thin gate dielectrics where significant tunneling currents flow. By taking the electron tunneling spectra in both polarities, one can determine the locations and energy levels of traps that appear in the ETS spectra. The procedure for the above and the associated derivation will be pres… Show more

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Cited by 24 publications
(28 citation statements)
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“…However, for the RJ, strong low-energy modes with additional trap-assisted reso-nant states at 100 and 121 mV are observed, suggesting a disordered growth of rubrene films. Based on a previous study on trap-assisted tunneling, 17 the energy level of the trap ͑V t ͒ above the electrode Fermi level and the physical position of the trap ͑d t ͒ from the bottom electrode are extracted using…”
mentioning
confidence: 99%
“…However, for the RJ, strong low-energy modes with additional trap-assisted reso-nant states at 100 and 121 mV are observed, suggesting a disordered growth of rubrene films. Based on a previous study on trap-assisted tunneling, 17 the energy level of the trap ͑V t ͒ above the electrode Fermi level and the physical position of the trap ͑d t ͒ from the bottom electrode are extracted using…”
mentioning
confidence: 99%
“…Since these phonons have much higher energies than kT at room temperature, they are not effective scattering centers at room temperature. IETS can also be used to probe electronic traps in gate dielectrics, as trap-assisted tunneling gives rise to distinct signature in the IETS spectrum, which is quite different from simple charge trapping [4,5] . Furthermore, one can calculate the spatial locations and energies of these electronic traps by analyzing the IETS spectra in both voltage polarities [5] , the details of which can be found in ref.…”
Section: Inelastic Electron Tunneling Spectroscopy (Iets)mentioning
confidence: 99%
“…Furthermore, one can calculate the spatial locations and energies of these electronic traps by analyzing the IETS spectra in both voltage polarities [5] , the details of which can be found in ref. [5].…”
Section: Inelastic Electron Tunneling Spectroscopy (Iets)mentioning
confidence: 99%
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“…When the thickness of the SiO 2 gate dielectric is below 1.4 nm, the electron tunneling effects and leakage current become serious obstacles for the device reliability [1]. The replacement of SiO 2 with high-k dielectrics (dielectric constant larger than that of SiO 2 , 3.9)is a solution to the challenge.…”
Section: Introductionmentioning
confidence: 99%