Estimation With Threshold Sensing for Gyroscope Calibration Using a Piezoelectric Microstage

Edamana, Biju; Chen, Yi; Slavin, Daniel; Aktakka, Ethem Erkan; Oldham, Kenn R.

doi:10.1109/tcst.2014.2386776

Cited by 15 publications

(2 citation statements)

References 16 publications

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“…The platform consists of a 3-DOF micromotion stage that can provide piezoelectric actuation for Z-translation and X/Y-tilting reference stimuli with a small off-axis motion compared to the preferred direction of actuation. The following research works are mainly focused on the in-situ calibration method for the gyroscope as well as the fabrication of larger micro vibrators [ 9 , 10 , 11 , 12 , 13 , 14 ]. Further, the transient linear acceleration and angular velocity output of those vibrators grow continuously up to 0.3 g [ 15 ] and 280°/s [ 10 ], respectively.…”

Section: Introductionmentioning

confidence: 99%

High Dynamic Micro Vibrator with Integrated Optical Displacement Detector for In-Situ Self-Calibration of MEMS Inertial Sensors

Yang

Gong

et al. 2018

Sensors

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The scale factor drifts and other long-term instability drifts of Micro-Electro-Mechanical SystemMEMS) inertial sensors are the main contributors of the position and orientation errors in high dynamic environments. In this paper, a novel high dynamic micro vibrator, which could provide high acceleration and high angular rate rotation with integrated optical displacement detector, is proposed. Commercial MEMS inertial sensors, including 3-axis accelerometer and 6-axis inertial measurement unit which is about 3 mm * 3 mm * 1 mm with 19 mg, could be bonded on the vibration platform of the micro vibrator to perform in-situ during the self-calibration procedure. The high dynamic micro vibrator is fabricated by a fully-integrated MEMS process, including lead zirconate titanate (PZT) film deposition, PZT and electrodes patterning, and structural ion etching. The optical displacement detector, using vertical-cavity surface-emitting laser (VCSEL) and photoelectric diodes (PD), is integrated on the top of the package to measure the 6-DOF vibrating displacement with the detecting resolution of 150 nm in the range of 500 μm. The maximum out-of-plane acceleration of the z-axis vibrating platform loaded with commercial 3-axis accelerometer (H3LIS331DL) achieves above 16 g and the maximum angular velocity achieves above 720°/s when the driving voltage is ±6 V.

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Section: Introductionmentioning

confidence: 99%

High Dynamic Micro Vibrator with Integrated Optical Displacement Detector for In-Situ Self-Calibration of MEMS Inertial Sensors

Yang

Gong

et al. 2018

Sensors

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“…Intuitively and without mathematical models, some researchers have noted that, on a gyroscope, the inertial forces that manifest the gyroscope effects are acting. However, in known publications, mathematical models for the gyroscope effects do not seem to match their practical applications in gyroscopic devices [13][14][15][16][17]. Therefore, researches have spawned artificial terms such as gyroscope resistance and gyroscope couple, as well as fantastical properties that contradict rules of classical mechanics.…”

Section: Introductionmentioning

confidence: 99%

A Mathematical Model for Top Nutation Based on Inertial Forces of Distributed Masses

Usubamatov

Omorova

2018

Mathematical Problems in Engineering

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The main property of gyroscopic devices is maintaining the axis of a spinning rotor, a mathematical model formulated on the principle of the change in the angular momentum. This principle is used for mathematical modeling of the motions of a top at known publications. Nevertheless, practical tests of gyroscopic devices do not correspond to this analytical approach. Recent investigations have demonstrated that the origin of gyroscope properties is more complex than that represented in known publications. The applied torque on a gyroscope produces internal torques of the spinning rotor based on the action of the several inertial forces. These forces are the centrifugal, Coriolis, and common inertial forces as well as the change in the angular momentum generated by the mass elements and center-mass of the spinning rotor. The action of these torques manifests itself in the resistance and precession torques of the gyroscopic devices. These inertial torques act simultaneously and interdependently around two axes and represent the fundamental principles of the gyroscope theory. The new inertial torques enable deriving mathematical models for the motions of well-known top that is the simplest form of gyroscopic devices. The novelty of the work is mathematical models for the motions of the top based on action of eight inertial forces acting around its two axes. The obtained mathematical models for the top nutation and self-stabilization are represented in terms of machine dynamics and vibration analysis. The new analytical approach for motions of the well-balanced top and top with eccentricity of the center-mass definitely responds to the practical results.

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A review on vibrating beam-based micro/nano-gyroscopes

et al. 2021

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Estimation With Threshold Sensing for Gyroscope Calibration Using a Piezoelectric Microstage

Cited by 15 publications

References 16 publications

High Dynamic Micro Vibrator with Integrated Optical Displacement Detector for In-Situ Self-Calibration of MEMS Inertial Sensors

High Dynamic Micro Vibrator with Integrated Optical Displacement Detector for In-Situ Self-Calibration of MEMS Inertial Sensors

A Mathematical Model for Top Nutation Based on Inertial Forces of Distributed Masses

A review on vibrating beam-based micro/nano-gyroscopes

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