A review on vibrating beam-based micro/nano-gyroscopes

Larkin, Kevin; Ghommem, Mehdi; Serrano, M.; Abdelkefi, A.

doi:10.1007/s00542-020-05191-z

Cited by 23 publications

(15 citation statements)

References 130 publications

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“…The deformation energy of the cantilever mainly includes axial tensile deformation energy and bending deformation energy, so the strain energy and radial displacement of the cantilever are [28,29]:…”

Section: Stiffness Calculation Of S-shaped Springsmentioning

confidence: 99%

Design and Fabrication of a Novel Wheel-Ring Triaxial Gyroscope

Guo

Wei

Cai

et al. 2022

Sensors

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This paper presents a new type of three-axis gyroscope. The gyroscope comprises two independent parts, which are nested to further reduce the structure volume. The capacitive drive was adopted. The motion equation, capacitance design, and spring design of a three-axis gyroscope were introduced, and the corresponding formulas were derived. Furthermore, the X/Y driving frequency of the gyroscope was 5954.8 Hz, the Y-axis detection frequency was 5774.5 Hz, and the X-axis detection frequency was 6030.5 Hz, as determined by the finite element simulation method. The Z-axis driving frequency was 10,728 Hz, and the Z-axis sensing frequency was 10,725 Hz. The MEMS gyroscope’s Z-axis driving mode and the sensing mode’s frequency were slightly mismatched, so the gyroscope demonstrated a larger bandwidth and higher Z-axis mechanical sensitivity. In addition, the structure also has good Z-axis impact resistance. The transient impact simulation of the gyroscope structure showed that the maximum stress of the sensitive structure under the impact of 10,000 g@5 ms was 300.18 Mpa. The gyroscope was produced by etching silicon wafers in DRIE mode to obtain a high aspect ratio structure, tightly connected to the glass substrate by silicon/glass anode bonding technology.

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Section: Stiffness Calculation Of S-shaped Springsmentioning

confidence: 99%

Design and Fabrication of a Novel Wheel-Ring Triaxial Gyroscope

Guo

Wei

Cai

et al. 2022

Sensors

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“…For instance, MEMS piezoelectric solid disk gyroscope was designed with an elliptic bulk acoustic wave mode [9]. Another piezo-based MEMS gyroscope utilizes a beam-based structure, where a piezoelectric layer is sandwiched between two electrodes [10].…”

Section: Introductionmentioning

confidence: 99%

Unlocking the potential of piezoelectric films grown on vertical surfaces for inertial MEMS

Gabrelian

Ross

Bespalova

et al. 2022

Materials Today Communications

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“…Their superior mechanical properties have attracted a wide spectrum of novel applications in modern science and technology [ 1 ]. Examples of novel devices employing small-sized structures are biosensors [ 2 ], piezoelectric actuators [ 3 ], nanosensors [ 4 ], and gyroscopes [ 5 ]. Profound understanding and characterizing mechanical properties of small-sized structures are critical to rational design procedure and performance assessment of these devices during their service life.…”

Section: Introductionmentioning

confidence: 99%

Strain-Gradient Bar-Elastic Substrate Model with Surface-Energy Effect: Virtual-Force Approach

et al. 2022

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This paper presents an alternative approach to formulating a rational bar-elastic substrate model with inclusion of small-scale and surface-energy effects. The thermodynamics-based strain gradient model is utilized to account for the small-scale effect (nonlocality) of the bar-bulk material while the Gurtin–Murdoch surface theory is adopted to capture the surface-energy effect. To consider the bar-surrounding substrate interactive mechanism, the Winkler foundation model is called for. The governing differential compatibility equation as well as the consistent end-boundary compatibility conditions are revealed using the virtual force principle and form the core of the model formulation. Within the framework of the virtual force principle, the axial force field serves as the fundamental solution to the governing differential compatibility equation. The problem of a nanowire embedded in an elastic substrate medium is employed as a numerical example to show the accuracy of the proposed bar-elastic substrate model and advantage over its counterpart displacement model. The influences of material nonlocality on both global and local responses are thoroughly discussed in this example.

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A review on vibrating beam-based micro/nano-gyroscopes

Cited by 23 publications

References 130 publications

Design and Fabrication of a Novel Wheel-Ring Triaxial Gyroscope

Design and Fabrication of a Novel Wheel-Ring Triaxial Gyroscope

Unlocking the potential of piezoelectric films grown on vertical surfaces for inertial MEMS

Strain-Gradient Bar-Elastic Substrate Model with Surface-Energy Effect: Virtual-Force Approach

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