Experimental Analysis of Laser Interferometry-Based Robust Motion Tracking Control of a Flexure-Based Mechanism

Bhagat, Umesh; Shirinzadeh, Bijan; Tian, Yanling; Zhang, Dawei

doi:10.1109/tase.2012.2205240

Cited by 51 publications

(24 citation statements)

References 38 publications

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“…The most famous description of the piezoelectricity was published by a standards committee of the IEEE Ultrasonics, Ferroelectrics, and Frequency Control Society with the linearized constitutive equations as follows [18], [23], [29]: (1) where the subscript indexes and refer to different directions within the Cartesian coordinate system, and represent the strain tensor and stress tensor, respectively, and are the electric field vector and electric displacement vector, respectively, is the elastic compliance matrix when subjected to a constant electrical field, is a matrix of piezoelectric material constants, and is the dielectric constant matrix under condition of constant stress. The first subscript index of the -constant gives the "electrical" direction (i.e., field or dielectric displacement), and the second one refers to the direction of mechanical strain or stress.…”

Section: B Working Principlementioning

confidence: 99%

Modeling and Control of Piezo-Actuated Nanopositioning Stages: A Survey

Zhu

et al. 2016

IEEE Trans. Automat. Sci. Eng.

523

216

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Piezo-actuated stages have become more and more promising in nanopositioning applications due to the excellent advantages of the fast response time, large mechanical force, and extremely fine resolution. Modeling and control are critical to achieve objectives for high-precision motion. However, piezo-actuated stages themselves suffer from the inherent drawbacks produced by the inherent creep and hysteresis nonlinearities and vibration caused by the lightly damped resonant dynamics, which make modeling and control of such systems challenging. To address these challenges, various techniques have been reported in the literature. This paper surveys and discusses the progresses of different modeling and control approaches for piezo-actuated nanopositioning stages and highlights new opportunities for the extended studies.Note to Practitioners-Piezo-actuated nanopositioning stages featuring fast response, large force, and fine resolution appear poised to play an increasingly important role in fields requiring micro/nano positioning. Such stages, however, exhibit complex piezoelectric behavior, which is often neglected, including: frequency response, nonlinear electric field dependence, creep, aging, and thermal behavior. The presence of such a behavior observed in the stages poses challenges in realizing precise micro/nanopositioning performance. This paper presents an overview of the piezo-actuated nanopositioning stages emphasizing the key role of modeling and control techniques, where high accuracy is important.

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Section: B Working Principlementioning

confidence: 99%

Modeling and Control of Piezo-Actuated Nanopositioning Stages: A Survey

Zhu

et al. 2016

IEEE Trans. Automat. Sci. Eng.

523

216

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“…This is realized by extending the model of a piezoelectric actuator presented in previous studies [28], [29]. The lumped parameter dynamic model of the 2-DOF flexure-based mechanism, driven by piezoelectric actuators is given as follows: …”

Section: Model Of 2-dof Flexure-based Micro/nanomanipulatormentioning

confidence: 99%

Experimental Investigation of Robust Motion Tracking Control for a 2-DOF Flexure-Based Mechanism

Bhagat

Shirinzadeh

Clark

et al. 2014

IEEE/ASME Trans. Mechatron.

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The design, parameter identification and robust motion tracking control of a two degree of freedom (2-DOF) flexurebased micro/nanomechanism are presented in this paper. In the presented compliant mechanism, the cross-axis coupling ratio is below 1% indicating excellent decoupling performance. Despite this, during motion tracking the cross coupling effect cannot be ignored. To enhance the accuracy of micro/nanomanipulation, a laser interferometry-based sensing and measurement system is established. Nonlinearities such as creep/drift and hysteresis are present in this system, which are compensated with closed-loop control. Open-loop tracking results for a 1-DOF trajectory, with and without cross-axis coupling compensation are also presented. Robust motion tracking control is extended to support 2-DOF motion trajectories. This controller is implemented to track the desired trajectories over one and two axes of motion. Robust motion control demonstrates high precision and accurate motion tracking of the 2-DOF flexure-based mechanism. The cross-axis coupling is treated as a known disturbance and the performance of tracking 1-DOF trajectory, with and without cross-axis coupling compensation, is presented. Circular motion trajectories with radii of 10 μm, 1 μm, and 250 nm are also tracked. The experimental results presented in this paper demonstrate effective compensation of the cross-axis coupling with high precision motion tracking. The resultant 2-DOF closed-loop position tracking error in the X and Y axes are within ±20 nm during dynamic motion, and ±8 nm in the steady state.

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“…The rotation of the interferometer measurements to find the and outputs is given by: (22) Hence, the combined uncertainties in the outputs can be found through (23) and (24). Fig.…”

Section: Propagation Of Individual Sourcesmentioning

confidence: 99%

“…Similarly, high resolution image sensors have also been utilised for inspection and manipulation at small scales [20,21]. Of these, laser interferometer-based methods are very promising as they function over a practically unlimited range, and have been shown to be suitable for feedback control of linear positioners [22]. However, rotational motion introduces misalignment, and thus geometric errors, and necessitates alternative methodologies for the determination of the end effector pose.…”

Section: Introductionmentioning

confidence: 99%

The bounds on tracking performance utilising a laser-based linear and angular sensing and measurement methodology for micro/nano manipulation

Clark¹,

Shirinzadeh²,

Tian³

et al. 2014

Meas. Sci. Technol.

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This paper presents an analysis of the tracking performance of a planar three Degrees of Freedom (DOF) flexure-based mechanism for micro/nano manipulation, utilising a tracking methodology for the measurement of coupled linear and angular motions. The methodology permits trajectories over a workspace with large angular range through the reduction of geometric errors. However, when combining this methodology with feedback control systems, the accuracy of performed manipulations can only be stated within the bounds of the uncertainties in measurement. The dominant sources of error and uncertainty within each sensing subsystem are therefore identified, which leads to a formulation of the measurement uncertainty in the final system outputs, in addition to methods of reducing their magnitude. Specific attention is paid to the analysis of the vision-based subsystem utilised for the measurement of angular displacement. Furthermore, a feedback control scheme is employed to minimise tracking errors, and the coupling of certain measurement errors is shown to have a detrimental effect on the controller operation. The combination of controller tracking errors and measurement uncertainty provides the bounds on the final tracking performance.

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Experimental Analysis of Laser Interferometry-Based Robust Motion Tracking Control of a Flexure-Based Mechanism

Cited by 51 publications

References 38 publications

Modeling and Control of Piezo-Actuated Nanopositioning Stages: A Survey

Modeling and Control of Piezo-Actuated Nanopositioning Stages: A Survey

Experimental Investigation of Robust Motion Tracking Control for a 2-DOF Flexure-Based Mechanism

The bounds on tracking performance utilising a laser-based linear and angular sensing and measurement methodology for micro/nano manipulation

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