2008
DOI: 10.1109/jmems.2008.924257
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Fabrication and Testing of a High-Speed Microscale Turbocharger

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Cited by 24 publications
(10 citation statements)
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References 23 publications
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“…The uniform cantilever beam of concentrated load on the rod end includes Then, ensuring the integration constant C through the boundary conditions, when x = L 0 = (L -D), Y# = 0, C can be obtained by using equation (13)…”
Section: Motion Model Of Rotor-piston Assemblymentioning
confidence: 99%
See 1 more Smart Citation
“…The uniform cantilever beam of concentrated load on the rod end includes Then, ensuring the integration constant C through the boundary conditions, when x = L 0 = (L -D), Y# = 0, C can be obtained by using equation (13)…”
Section: Motion Model Of Rotor-piston Assemblymentioning
confidence: 99%
“…The package of the MEPS is less than 1 cm 3 in volume, and the silicon is the main material to form the MEPS structure. Savoulides et al 13 also introduced an MEPS which uses a micro turbine as power source. The speed of turbocharger can reach 480,000 r/min, and the pressure ratio is 1.21 of compressor to produce about 5 W of power.…”
Section: Introductionmentioning
confidence: 99%
“…以碳氢化合 物为燃料, 微型热机体积小, 重量轻, 功率密度高, 续航 时间长, 尤其对于1~100 W量级电源动力系统十分适 用 [4] , 已成为新一代便携式电源的重点研究方向. 当前 在研的微热机系统, 涵盖了微型燃气轮机 [5] 、微型自 由活塞发动机 [6] 、微型转子发动机 [7] 、微型斯特林发 动机 [8] 、微型摆式内燃机 [9,10] 等众多机型. 然而, 受尺 度效应影响, 不可逆损失(流动泄漏、摩擦、传热等) 被严重放大, 加之微尺度燃烧困难、尾气过热等因素, 效率低下、功率不足已成为制约微动力系统发展的首 要难题 [11,12] .…”
Section: 引言unclassified
“…The wafers are bonded and diced afterwards into individual sensor dies . Just like the multilayer gas turbine of MIT (Savoulides et al 2008), this is a similar daunting task for the microfabrication researchers. And the challenge is to bond multilayer with different material and structures.…”
Section: Integrated Fabricationmentioning
confidence: 99%