A low-order model was created to analyze a small-scale gas bearing with a diameter of 4.1 mm, designed to spin at 2.4 million rpm. Due to microfabrication constraints, the bearing lies outside the standard operating space and stable operation is a challenge. The model is constructed by reference to Newton’s second law for the rotor and employs stiffness and damping coefficients predicted by other models. At any operating point it is able to predict (1) whether the journal can sustain stable operation, and (2) the whirling frequency of the journal. Analysis shows that the best way to operate the bearing is in a hybrid mode where the bearing relies on hydrostatics at low speeds and hydrodynamics at high speeds. However, in transitioning from hydrostatic to hydrodynamic operation, the model shows that the bearing is prone to instability problems and great care must be taken in scheduling the bearing pressurization system in the course of accelerating through low and intermediate rotational speeds.

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Microscale turbocharger devices have been fabricated and tested. The device, formed by fusion bonding six silicon wafers, consists of a free rotor (with a compressor and turbine) contained within a static structure. A pressure differential across the turbine generates a torque that spins the rotor, producing flow and pressure rise through the compressor. This paper addresses fabrication issues critical to high speed operation of this device, such as journal bearing profile control, nozzle and thrust bearing process control and integration, rotor integration, and rotor imbalance, providing the first discussion of fabrication innovations developed specifically for the turbocharger. Preliminary test results are also included.