2011
DOI: 10.1088/0256-307x/28/1/010701
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Fabrication of Dry Electrode for Recording Bio-potentials

Abstract: Development of minimally invasive dry electrodes for recording biopotentials is presented. The detailed fabrication process is outlined. A dry electrode is formed by a number of microneedles. The lengths of the microneedles are about 150 𝜇m and the diameters are about 50 𝜇m. The tips of the microneedles are sharp enough to penetrate into the skin. The silver/silver chloride is grown on microneedle arrays and demonstrates good character. The electrocardiogram shows that the dry electrode is suitable for recor… Show more

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Cited by 13 publications
(7 citation statements)
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“…To improve the performance of conventional wet EEG sensors, micro-electro-mechanical systems (MEMS) have been used to develop dry MEMS electrodes to measure EEG signals [ 13 16 ]. Dry MEMS EEG electrodes with several micro-needles on their top surface can successfully acquire forehead EEG signals [ 13 , 14 , 16 ]. The micro-needles are used to penetrate the outer skin surface layers to acquire the EEG signals [ 16 ].…”
Section: Introductionmentioning
confidence: 99%
“…To improve the performance of conventional wet EEG sensors, micro-electro-mechanical systems (MEMS) have been used to develop dry MEMS electrodes to measure EEG signals [ 13 16 ]. Dry MEMS EEG electrodes with several micro-needles on their top surface can successfully acquire forehead EEG signals [ 13 , 14 , 16 ]. The micro-needles are used to penetrate the outer skin surface layers to acquire the EEG signals [ 16 ].…”
Section: Introductionmentioning
confidence: 99%
“…The distance between the positive and negative electrodes was 20 mm, and Ag was deposited on the surface of the FXbs electrode in a 0.9% NaCl electrolyte at a constant voltage of 1 V for 10 s, using the constant pressure deposition method. 5 Then, Ag was chlorinated to form AgCl, creating a polarized/ nonpolarized composite structure Ag/AgCl. Figure 1e shows a photograph of the Fructus xanthii-inspired FXbs template,…”
Section: Resultsmentioning
confidence: 99%
“…The surface microneedle array electrodes can avoid changes in skin potential due to skin stretching or electrode movement and can be divided into rigid microneedle array electrodes (RMAEs) and flexible microneedle array electrodes (FMAEs) . RMAEs can penetrate the high-impedance SC without skin pretreatment, thereby making direct contact with low-impedance living epidermal cells to eliminate the need for conductive gels. However, there is a risk that such electrodes may break in practice, resulting in microneedle fractures entering the body. The main processing method for FMAEs is the processing of metallic patterns or conductive coatings on a flexible substrate, which makes them conductive and stretchable. Compared to RMAEs, the flexible substrate of FMAEs naturally conforms to skin curves, with better adapting to the skin structure, curvature, and surface hair, resulting in more comfortable, stable, and lower impedance performance …”
Section: Introductionmentioning
confidence: 99%
“…EAs were fabricated by traditional microfabrication technology Wang et al 2011) (Fig. 3), including photolithograghy, deposition and wet etching.…”
Section: Fabrication Of Easmentioning
confidence: 99%