Fabrication of Glassy Carbon Molds Using Hydrogen Silsequioxane Patterned by Electron Beam Lithography as O<sub>2</sub> Dry Etching Mask

Yasui,; Sugiyama,; Takahashi, Daisuke; Kaneko,; Uegaki,; Hirabayashi,; Maeda$^{, }$

doi:10.1109/imnc.2007.4456218

Cited by 3 publications

(2 citation statements)

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“…Then, these microholes were imprinted on glass followed by the transformation into an MLA using the thermal reflow of the glass. Yasui et al [ 113 ] proposed combining electron beam writing with plasma-coupled RIE to fabricate line and space patterns with a depth of 300 nm on the surface of GC. Then, these grating patterns were transcribed to Pyrex glass using hot embossing.…”

Section: Mold Materials For Precision Glass Moldingmentioning

confidence: 99%

“…Examples of micro/nano glass molding using GC molds are summarized in Table S5 of the Supplementary Material [ 23 , 105 , 106 , 107 , 108 , 109 , 110 , 111 , 112 , 113 , 114 , 116 , 117 , 119 , 120 , 121 , 122 , 123 , 124 , 125 , 126 , 127 , 128 , 129 , 130 ]. There are approaches available to fabricate GC molds.…”

Section: Mold Materials For Precision Glass Moldingmentioning

confidence: 99%

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A Comprehensive Review of Micro/Nano Precision Glass Molding Molds and Their Fabrication Methods

et al. 2021

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Micro/nano-precision glass molding (MNPGM) is an efficient approach for manufacturing micro/nanostructured glass components with intricate geometry and a high-quality optical finish. In MNPGM, the mold, which directly imprints the desired pattern on the glass substrate, is a key component. To date, a wide variety of mold inserts have been utilized in MNPGM. The aim of this article is to review the latest advances in molds for MNPGM and their fabrication methods. Surface finishing is specifically addressed because molded glass is usually intended for optical applications in which the surface roughness should be lower than the wavelength of incident light to avoid scattering loss. The use of molds for a wide range of molding temperatures is also discussed in detail. Finally, a series of tables summarizing the mold fabrication methods, mold patterns and their dimensions, anti-adhesion coatings, molding conditions, molding methods, surface roughness values, glass substrates and their glass transition temperatures, and associated applications are presented. This review is intended as a roadmap for those interested in the glass molding field.

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Section: Mold Materials For Precision Glass Moldingmentioning

confidence: 99%

Section: Mold Materials For Precision Glass Moldingmentioning

confidence: 99%

A Comprehensive Review of Micro/Nano Precision Glass Molding Molds and Their Fabrication Methods

et al. 2021

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A study of imprint mold materials suited for B₂O₃‐La₂O₃‐based glass

Yasui

Omata²,

Sugimoto

et al. 2011

Elect Comm in Japan

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SUMMARYThe reactivity between nanoimprint mold materials and optical glass has been investigated by measuring the contact angle between these materials in a nitrogen atmosphere at high temperatures up to 1000 °C. Since low-softening-temperature optical glass was chosen in this study, the thermal upper limit of the contact angle measurement was set as 800 °C. As mold materials, electrodeposited Ni-W alloy containing 40 wt-% W and glasslike carbon (GC) were chosen. In the case of GC, the contact angle did not change greatly at temperatures up to 800 °C, and an obvious reactant phase in the interface layer between the GC and the molten glass was observed. In the case of the Ni-W alloy, the contact angle decreased with increasing temperature, and no reactant phase was observed at the interface. This indicates that the Ni-W alloy is suitable as a mold material for B 2 O 3 -La 2 O 3 -based optical glass.

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The Study of the Imprint Mold Materials Suited for B2O3-La2O3 Based Glass

Yasui

Omata²,

Sugimoto

et al. 2008

IEEJ Trans. SM

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Fabrication of Glassy Carbon Molds Using Hydrogen Silsequioxane Patterned by Electron Beam Lithography as O₂ Dry Etching Mask

Cited by 3 publications

References 0 publications

A Comprehensive Review of Micro/Nano Precision Glass Molding Molds and Their Fabrication Methods

A Comprehensive Review of Micro/Nano Precision Glass Molding Molds and Their Fabrication Methods

A study of imprint mold materials suited for B₂O₃‐La₂O₃‐based glass

The Study of the Imprint Mold Materials Suited for B2O3-La2O3 Based Glass

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Fabrication of Glassy Carbon Molds Using Hydrogen Silsequioxane Patterned by Electron Beam Lithography as O2 Dry Etching Mask

Cited by 3 publications

References 0 publications

A Comprehensive Review of Micro/Nano Precision Glass Molding Molds and Their Fabrication Methods

A Comprehensive Review of Micro/Nano Precision Glass Molding Molds and Their Fabrication Methods

A study of imprint mold materials suited for B2O3‐La2O3‐based glass

The Study of the Imprint Mold Materials Suited for B2O3-La2O3 Based Glass

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Product

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Fabrication of Glassy Carbon Molds Using Hydrogen Silsequioxane Patterned by Electron Beam Lithography as O₂ Dry Etching Mask

A study of imprint mold materials suited for B₂O₃‐La₂O₃‐based glass