Fabrication of micro/nanoporous templates with a novel hierarchical structure by anodization of a patterned aluminum surface

Shen, Le; Li, Yang; Zhong, Wang; Wu, Jingcheng; Cheng, Jianhua; Liu, Jin; Hu, Xing; Ling, Zhiyuan

doi:10.1016/j.elecom.2021.107014

Cited by 15 publications

(7 citation statements)

References 25 publications

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“…In recent years, with the development of science and technology and the progress of the times, the demand of the society for high-performance materials has gradually expanded. Porous anodic oxides (PAOs) have shown considerable application potential in energy, environment, medical, and other fields due to their regular structure, large specific surface area, and ease to design. − Over the years, the research on PAOs has mostly focused on the preparation process and the application of porous structures. − However, there are few studies on the electrochemical anodization process of metals and the formation mechanism of porous structures. Therefore, the growth kinetic of PAO is still very controversial. − Based on the field-assisted dissolution (FAD) theory and the field-assisted ejection theory, a “top-down” mining model is proposed.…”

Section: Introductionmentioning

confidence: 99%

Simulation of Anodic Current and Optimization of the Fitting Equation and the Fitting Algorithm during Constant Voltage Anodization

Li,

Luo,

Yan

et al. 2023

J. Phys. Chem. C

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To investigate the formation mechanism of anodization and to clarify the relationship between the reaction process and the actual structure, we fitted the current density–time curve based on MATLAB. A time-varying function C(t) is introduced to optimize the total current fitting equation used to describe the constant voltage anodization process, which makes the equation more in line with the real reaction process based on the kinetic model of ionic and electronic current. Besides, a new fitting algorithm is developed based on the trust region method, which can effectively improve the fitting effect through iteration. In our work, the initial values of the parameters in the equation were calculated, and finally, the fitting degree of the constant voltage anodization under 40, 50, and 60 V was improved to 0.9842, 0.9693, and 0.9305, respectively. According to the new equation, the fitting degree of the total amount of charge transferred by ions during the reaction and the volume of oxides according to a proportional function can reach 0.9972.

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Section: Introductionmentioning

confidence: 99%

Simulation of Anodic Current and Optimization of the Fitting Equation and the Fitting Algorithm during Constant Voltage Anodization

Li,

Luo,

Yan

et al. 2023

J. Phys. Chem. C

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“…Electrochemical anodization and electrochemical synthesis of aluminum, titanium, zirconium and other metals have attracted more and more attention. [1][2][3][4][5][6] Porous anodic alumina (PAA), anodic TiO 2 and ZrO 2 nanotube structures are widely used in solar cells, supercapacitors and various sensors. [7][8][9][10][11] However, the formation mechanism of the porous structure and nanotube structure of this kind of porous anodic oxide (PAO) is very controversial.…”

Section: Introductionmentioning

confidence: 99%

Unraveling the six stages of the current–time curve and the bilayer nanotubes obtained by one-step anodization of Zr

Wang

et al. 2022

Nanoscale Adv.

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“…In fields such as electronic-equipment manufacturing, biotechnology, and medicine, miniaturization and large-scale integration of systems are advancing, and process technology is being used to upgrade the functions of materials, substrates, and microdevices [ 1 , 2 , 3 , 4 , 5 , 6 ]. This development includes the demand for various structures with complex shapes, such as three-dimensional structures for realizing effective microregional chemical reactions, mixing, and analyses in various fields, including biological microelectromechanical systems (bioMEMSs) and micro total analysis systems (µTASs) [ 7 , 8 , 9 , 10 , 11 ].…”

Section: Introductionmentioning

confidence: 99%

Fabrication of Three-Dimensionally Deformable Metal Structures Using Precision Electroforming

et al. 2022

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It is difficult to fabricate three-dimensional structures using semiconductor-process technology, because it is based on two-dimensional layered structure fabrication and the etching of thin films. In this study, we fabricated metal structures that can be dynamically deformed from two-dimensional to three-dimensional shapes by combining patterning using photolithography with electroforming technology. First, a resist structure was formed on a Cu substrate. Then, using a Ni sulfamate electroforming bath, a Ni structure was formed by electroforming the fabricated resist structure. Finally, the resist structure was removed to release the Ni structure fabricated on the substrate, and electroforming was used to Au-plate the entire surface. Scanning-electron microscopy revealed that the structure presented a high aspect ratio (thickness/resist width = 3.5), and metal structures could be fabricated without defects across the entire surface, including a high aspect ratio. The metallic structures had an average film thickness of 12.9 µm with σ = 0.49 µm, hardness of 600 HV, and slit width of 7.9 µm with σ = 0.25 µm. This microfabrication enables the fabrication of metal structures that deform dynamically in response to hydrodynamic forces in liquid and can be applied to fields such as environmental science, agriculture, and medicine.

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Fabrication of micro/nanoporous templates with a novel hierarchical structure by anodization of a patterned aluminum surface

Cited by 15 publications

References 25 publications

Simulation of Anodic Current and Optimization of the Fitting Equation and the Fitting Algorithm during Constant Voltage Anodization

Simulation of Anodic Current and Optimization of the Fitting Equation and the Fitting Algorithm during Constant Voltage Anodization

Unraveling the six stages of the current–time curve and the bilayer nanotubes obtained by one-step anodization of Zr

Fabrication of Three-Dimensionally Deformable Metal Structures Using Precision Electroforming

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