2007
DOI: 10.1063/1.2822472
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Ferroelectric and dielectric behavior of heterolayered PZT thin films

Abstract: Heterolayered Pb(Zr1−xTix)O3 thin films consisting of different numbers of alternating Pb(Zr0.7Ti0.3)O3 and Pb(Zr0.3Ti0.7)O3 layers are studied. They exhibit (001)∕(100) preferred orientation and dense microstructure when baked at 500°C and then thermally annealed at 650°C. They demonstrate a considerably low leakage current density in the order of 10−7A∕cm2. Their ferroelectric and dielectric properties are improved with increasing number of alternating Pb(Zr0.7Ti0.3)O3 and Pb(Zr0.3Ti0.7)O3 layers, thereby th… Show more

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Cited by 30 publications
(22 citation statements)
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“…Cross-sectional electron microscopy and electron-probe microanalysis confirmed that there was no intermixing between the functional layers. Further processing details and macroscopic ferroelectric properties are given elsewhere [35]. A multimode atomic force microscope with Pt/Ir-coated cantilever (with typical tip radius 7 nm, force constant 0.2 N m À1 , resonant frequency 13 kHz) was employed at a scan rate of 0.8 Hz for the visualization of domain structure.…”
Section: Methodsmentioning
confidence: 99%
“…Cross-sectional electron microscopy and electron-probe microanalysis confirmed that there was no intermixing between the functional layers. Further processing details and macroscopic ferroelectric properties are given elsewhere [35]. A multimode atomic force microscope with Pt/Ir-coated cantilever (with typical tip radius 7 nm, force constant 0.2 N m À1 , resonant frequency 13 kHz) was employed at a scan rate of 0.8 Hz for the visualization of domain structure.…”
Section: Methodsmentioning
confidence: 99%
“…1-3 These properties find their applications in microelectromechanical systems, electronic memories, sensors, and actuators. [4][5][6] Significant attention is being paid to engineering ferroelectric systems with enhanced dielectric properties via graded ferroelectric films, complex oxide superlattices, and ferroelectric multilayers. 7-10 A simple and reliable approach to measuring dielectric properties in ferroelectric systems including ferroelectric multilayers is important for the development of new materials.…”
mentioning
confidence: 99%
“…x O 3 compounds but also in the HfO 2 based ferroelectric thin films and so on [19][20][21][22][23][24]. The physical origins of wake-up effect is associated with the domain reorientation and the defect deformation.…”
Section: Introductionmentioning
confidence: 99%