Fiber-Optic Fabry-Perot High-Pressure Sensor for Marine Applications

Weihang, 张伟航 Zhang; Junfeng, 江俊峰 Jiang; Shuang, 王双 Wang; Kun, 刘琨 Liu; Xuezhi, 张学智 Zhang; Zhenyang, 丁振扬 Ding; Tiegen, 刘铁根 Liu

doi:10.3788/aos201737.0206001

Cited by 3 publications

(1 citation statement)

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“…Optical fiber MEMS pressure sensors have the characteristics of small volume, light weight, anti-electromagnetic interference, and tolerance to harsh environments [15] and are widely used in biomedicine, environmental monitoring, and other fields [16][17][18].…”

Section: Introductionmentioning

confidence: 99%

Research on Temperature Compensation of Optical Fiber MEMS Pressure Sensor Based on Conversion Method

Yao

Shang

et al. 2022

Photonics

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The characteristics of optical fiber MEMS pressure sensors are easily affected by temperature, so effective temperature compensation can improve the accuracy of the sensor. In this paper, the temperature characteristics of optical fiber MEMS pressure sensors are studied, and a temperature compensation method by converting the wavelength is proposed. The influence of target temperature and data point selection on the compensation effect is studied, and the effectiveness of the method is verified by the temperature compensation of sensors before and after aging. When the converted target temperature is 25 °C, the pressure measurement accuracy of the sensor is improved from 1.98% F.S. to 0.38% F.S. within the range of 5–45 and 0–4 MPa. The method proposed in this paper can not only improve the accuracy but also make the regular calibration more operable.

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