2009
DOI: 10.1117/12.818381
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Fiber optics low-coherence IR interferometry for defense sensors manufacturing

Abstract: We present novel fiber optics low coherence interferometer apparatus, and novel probe for in-situ characterization of semiconductor structures for IR detector manufacturing. Probe does not exhibit polarization, or strain sensitivity observed in earlier invented systems. In addition it is demonstrated to be able to operate with varying length of optical fibers.

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Cited by 5 publications
(5 citation statements)
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“…The problem of light polarization for these kind of interferometers is well known. A standard solution is given by a different scheme, the auto-correlator [12], shown in Figure 9. This scheme measures the beating frequencies between the reflection of the two surfaces, instead of the ones between a mirror and a single surface.…”
Section: Methodsmentioning
confidence: 99%
“…The problem of light polarization for these kind of interferometers is well known. A standard solution is given by a different scheme, the auto-correlator [12], shown in Figure 9. This scheme measures the beating frequencies between the reflection of the two surfaces, instead of the ones between a mirror and a single surface.…”
Section: Methodsmentioning
confidence: 99%
“…The length of the arms of the Michelson interferometer is adjusted by using a set of calibration block gauges often used in mechanical engineering application [6]. The detailed calibration procedure is described in another of our paper presented at this conference [7].…”
Section: Spectrometer Calibrationmentioning
confidence: 99%
“…Ix ðÞ¼Sx ðÞ ⊗ δ x ðÞ þ δ x AE nd ðÞ ðÞ ½ (14) Then, the signal was passed through a high-pass filter that eliminates the DC component, obtaining a signal as indicated in Figure 8, which can be expressed as…”
Section: Detection and Processingmentioning
confidence: 99%
“…Among the industrial metrological applications, the following can be mentioned: the measurement of very thin thicknesses in semiconductor wafers [9,10], the characterization of surfaces [11,12], the control of thickness in the coating of pills in the pharmaceutical industry [13], and others. OCT systems based on fiber optics are particularly suitable for use in industrial [14], hostile (electromagnetic interference, radioactive, cryogenic, or very high temperatures) [15], or difficult-to-access environments [16]. Moreover, optical fiber-based OCT devices can take the advantage of beam stability and lower price of IR components used in optical communications.…”
Section: Introductionmentioning
confidence: 99%