2006 IEEE Compound Semiconductor Integrated Circuit Symposium 2006
DOI: 10.1109/csics.2006.319926
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Field-Plate Optimization of AlGaN/GaN HEMTs

Abstract: An investigation on the field plate technique in AlGaN/GaN power HEMTs is presented. The critical geometrical variables controlling the field distribution in the channel are determined and optimized for improved device reliability using two-dimensional numerical simulations. The results are implemented in the design of devices fabricated with 600 nm down to 150 nm gate lengths. Good agreement between experimental and simulation data is achieved.

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Cited by 24 publications
(6 citation statements)
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“…3. As it was expected [8], field plate regulates the electrical field within the 2DEG and decreases the intensity of electrical field both in the 2DEG region and the hotspot region. Similar to the electrical field, heat flux data can be obtained from electrical simulations.…”
Section: Resultssupporting
confidence: 57%
See 1 more Smart Citation
“…3. As it was expected [8], field plate regulates the electrical field within the 2DEG and decreases the intensity of electrical field both in the 2DEG region and the hotspot region. Similar to the electrical field, heat flux data can be obtained from electrical simulations.…”
Section: Resultssupporting
confidence: 57%
“…On the other hand, the field plated GaN HEMTs are under intensive research to regulate sharp electric field variations in devices [8]. However; the effects of field plates on the hotspot region and device temperature are not studied enough to improve the system dynamics.…”
Section: Introductionmentioning
confidence: 99%
“…A multistep gate electrode and a source-connected field plate (SFP) implemented in the first metallization level were used to relax the electric field strength at the drain side of the gate=channel region. [9][10][11] The gate leakage current was reduced to 15 nA=mm by using a SiN gate dielectric. The deposition conditions and properties of the SiN layers were optimized to stabilize the donor-like traps at the SiN=AlGaN interface for controlling collapse and long-term R on characteristics.…”
Section: Gan Hemt Technology and Device Descriptionmentioning
confidence: 99%
“…However, the non-uniform electric field distribution caused by the combined effect of gate and drain voltages has a significant impact on electron motion at the AlGaN/GaN heterojunction interface, resulting in a lower electron velocity on the source side than on the drain side, which lowers the carrier transport efficiency [ 7 ]. Related strategies for controlling the electric field distribution, such as field plate technology [ 8 ] and a dual-metal gate (DMG) structure [ 9 ], have recently been investigated. DMG structures, in particular, can significantly regulate the electric field distribution in the channel, leading to a higher output current in the devices without considering the self-heating effect [ 10 ], as well as suppressing short-channel effects such as drain-induced barrier lowering (DIBL) [ 11 ].…”
Section: Introductionmentioning
confidence: 99%