2014
DOI: 10.1149/2.031404jes
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Formation of CuIn(1-x)GaxSe2(CIGS) by Electrochemical Atomic Layer Deposition (ALD)

Abstract: The formation of CuIn (1-x) Ga x Se 2 (CIGS) by electrochemical atomic layer deposition (E-ALD) is reported. Two different CIGS E-ALD cycle programs were investigated. The first consisted of the sequential deposition of alternating atomic layers (AL) metal and Se. That is, AL of Cu, In and Ga were alternated with AL of Se, in what is referred to as a quaternary CIGS program. The second was a superlattice program, composed of differing numbers of the binary compound cycles repeated in a period. The use of the s… Show more

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Cited by 9 publications
(21 citation statements)
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“…38 The process of E-ALD of CIGS was conducted by depositing alternate layers of binary compounds of the following series from our experience (see Figure S 1 ): InSe/InSe/GaSe/GaSe/CuSe called as superlattice period (SP) which is expected to be approximately making one CIGS monolayer on Mo. Repeating the number of superlattice periods can produce wanted quality film.…”
Section: Resultsmentioning
confidence: 99%
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“…38 The process of E-ALD of CIGS was conducted by depositing alternate layers of binary compounds of the following series from our experience (see Figure S 1 ): InSe/InSe/GaSe/GaSe/CuSe called as superlattice period (SP) which is expected to be approximately making one CIGS monolayer on Mo. Repeating the number of superlattice periods can produce wanted quality film.…”
Section: Resultsmentioning
confidence: 99%
“…The CIS was deposited by superlattice sequencing of 3InSe/1CuSe and attained the conformal stoichiometry of Cu 1.1 InSe 1.9 with Cu deposition varied. 36 In a more recent E-ALD work of CIGS synthesis, 38 they reported the procedure by alternate sequencing and superlattice sequencing every binary compound. They achieved different stoichiometry films on different alternate sequencing and superlattice sequencing by depositing a different number of periods or 38 Although CIGS film with classic stoichiometry was achieved on model Au surface by means of E-ALD, it would be interesting with application perspective to find whether a similar film by the method can be prepared on the practical surface of Mo, which is often the choice of the substrate for CIGS solar cells and yet the complex substrate in the ambient laboratory conditions because of the surface oxides formed.…”
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confidence: 99%
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“…In the present work, an electrochemical technique * Electrochemical Society Member. [39][40][41] In the following introductory discussion, the process of e-ALD of Cu is described as a representative example. The conventional Cu e-ALD process begins with the deposition of a sacrificial lead (Pb) monolayer onto a foreign substrate via underpotential deposition (UPD) in a Pb +2 -containing electrolyte.…”
mentioning
confidence: 99%
“…Recent reports demonstrated the potential of electrodeposited ternary and quaternary chalcopyrite absorber layers for various solar energy conversion devices. [23][24][25][26] In spite of a good number of investigations on the electrodeposition of Cu, Se, In and Ga and the various compositions on different electrodes, [1][2][3][4] several concepts and explanations on the origin of different voltammetric peaks are still under debates. Reported works that methodically investigated the development of voltammetric peaks in unary, binary, ternary and quaternary compositions on Mo electrode (consolidated and compared in one work) are rare.…”
mentioning
confidence: 99%