2009
DOI: 10.1016/j.vacuum.2009.04.044
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Friction and adhesion properties of fluorocarbon polymer thin films prepared by magnetron sputtering

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Cited by 22 publications
(17 citation statements)
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“…We also reported the fluorocarbon thin films prepared by the r.f. sputtering showed good adhesion between SUS302 plate [24] and Cu thin film prepared by vacuum evaporation [25]. Fluorine or fluorocarbon molecules have strong affinity for Cu atom as the difference of electronegativity between fluorine atom and Cu atom is large, which affects adhesion strength between the fluorocarbon thin film and Cu thin film.…”
Section: Effect Of the Cu Interfacial Layer On The Adhesion And Wear mentioning
confidence: 99%
“…We also reported the fluorocarbon thin films prepared by the r.f. sputtering showed good adhesion between SUS302 plate [24] and Cu thin film prepared by vacuum evaporation [25]. Fluorine or fluorocarbon molecules have strong affinity for Cu atom as the difference of electronegativity between fluorine atom and Cu atom is large, which affects adhesion strength between the fluorocarbon thin film and Cu thin film.…”
Section: Effect Of the Cu Interfacial Layer On The Adhesion And Wear mentioning
confidence: 99%
“…The peel testing on a small area was conducted using a SAICAS (Nagai et al, 2002;Oyane et al, 2009;Saito et al, 2009Saito et al, , 2012Iwamori et al, 2010). The blade was made of diamond and had a width of 0.1 mm.…”
Section: Measurement Of the Peel Strength Using Saicasmentioning
confidence: 99%
“…This force indicates the peel strength between the Cu trace and the epoxy resin, as shown Figure 4(b). The peel strength (P), and shear stress (t), can be, respectively, expressed as Nagai et al (2002), Saito et al (2009) and Iwamori et al (2010):…”
Section: Measurement Of the Peel Strength Using Saicasmentioning
confidence: 99%
“…sputtering (in this case via a magnetron) and tested using the pin on disc technique, that both wear resistance and coefficient of friction increased with the magnetic field strength of the sputterer. 110 Tests conducted using a friction abrasion analyser showed that the hydrophobicity of fluorinated carbon film coated surfaces degraded rapidly with wear. As these films have a low surface energy, they generally have low coefficients of friction which are usually desirable.…”
Section: Solid Interactions 21 Wear Mechanismsmentioning
confidence: 99%