Uniformly distributed quantum-well structure was introduced to a lateral-current-injection (LCI) laser to realize high internal quantum efficiency operation. As the result, superior light output characteristic was obtained with the internal quantum efficiencies of 70%.
I. INTRODUCTIONThe performance of the LSI will soon expected to confront the limitation due to the ohmic heating, RC delay, power consumption, and crosstalk in the global wiring. As a promising solution, a replacement of the electrical global wiring on a chip with an optical wiring is extensively studied [1]. An ultra low power consumption laser is required for such optical interconnection, and we have proposed and demonstrated distributed feedback (DFB) lasers consisting of a semiconductor membrane structure [2], where the active waveguide is sandwiched between low refractive index cladding layers such as benzocyclobutene (BCB) or SiO2. An ultra low threshold current operation is theoretically expected due to an enhancement of the optical confinement factor in quantum-wells (QWs) by utilizing a thin (approximately 150 nm) semiconductor core layer with high index-contrast waveguide structure. Previously, we have demonstrated low threshold (0.34 mW) and stable single-mode operation under a room temperature continuous wave (RT-CW) optical pumping [3], and the device oscillated up to 85 º C under a CW condition [4].As a step to realize an injection-type membrane laser, we introduced a latera-current-injection (LCI) structure [5] and demonstrated LCI-Fabry-Perot (FP) lasers [6] and DFB lasers [7] consisting of compressively-strained (CS) 5 QWs with a 400-nm-thick GaInAsP core layer prepared on a semi-insulating (SI) InP substrate. However, relatively low internal quantum efficiency of around 40 % [8], which may be attributed to large carrier leakage from n-InP to p-InP through optical confinement layers (OCLs), was an issue to be solved. In order to improve the internal quantum efficiency of the LCI-type lasers, we introduced uniformly distributed QW structure and successfully accomplished high internal quantum efficiency operation of the LCI-FP laser.