“…The numerical simulation based on CFD is able to provide quantitative information of flow behavior and species transport, but typically relies to a large extent on the thermodynamic data, reaction mechanism, and transport properties. Monobutyltin trichloride (or MBTC) used for SnO 2 deposition in the glass industry, which is of interest in the current work, has very limited data reported in the literature [6][7][8][9][10][11]. While it is experimentally shown that the reaction of MBTC with oxygen is accelerated in the presence of water, the function of water in the decomposition and/or oxidation of MBTC, is not fully understood.…”