In this paper, ESD triggering mechanism of the parasitic PNP bipolar transistor in rail-based ESD protection circuits was investigated. The device simulation results show that the triggering voltage of the parasitic PNP varies with the geometry of the base region (e.g., the spacing between P+ and N-well). Furthermore, the test structures of parasitic PNP devices with different width of collector and base region were fabricated using the 65 nm low-k logic/Mixed-Mode CMOS process and characterized with the transmission line pulse (TLP) system. Both simulation and experimental results demonstrated that the triggering voltage of parasitic PNP structures has strong dependence on the base region and the simulation results also show that the triggering voltage is significantly affected by the spacing between P-well and N-well.