“…If the growth is performed at higher temperature or if the film is annealed, more stable phases can be seen, such as Mn 5 Ge 2 , Mn 5 Ge 3 or Mn 11 Ge 8 clusters. 14,21,24,26,[28][29][30][31][32][33][34][35] Many studies have shed light on the magnetic and electronic properties of the GeMn nanocolumns and inclusions. 15,16,19,26,32,33,[36][37][38] In terms of structural properties, the relationship between the GeMn layer and the Mn 5 Ge 3 clusters is now well known.…”