“…There are several reports in the literature, where the N-incorporation mechanisms in dilute nitrides are controversially discussed [37][38][39][40][41][42][43][44][45]. The present paper tries to reconcile this controversy by studying the N-incorporation in great detail by varying the temperature, the V/III-ratio, the V/V-ratio, the growth rate, the reactor pressure, the chemical composition as well as the strain-state of the Ga(NAs) and (GaIn)(NAs) films also for different N-precursor molecules.…”