2011
DOI: 10.5402/2011/684748
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Growth of Vertically Aligned Carbon Nanotubes on Silicon Using a Sparked Iron-Cobalt Catalyst

Abstract: Vertically aligned carbon nanotubes (VA-CNTs) were successfully grown on silicon substrates by atmospheric pressure chemical vapor deposition at 750∘C using acetylene as a carbon source and Fe-Co nanoparticle thin films as a cocatalyst. Preparation of the cocatalyst was operated by an economical sparking process. A small amount of water vapor was introduced into the reactor by controlling diffusion by heated water in a flask. The CNTs were characterized by scanning electron microscopy, transmission electron mi… Show more

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Cited by 4 publications
(3 citation statements)
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“…Ultralong CNTs were produced with ethylene precursor using water and hydrogen [29]. By employing an appropriate choice of the carbon precursor and optimal feed rate of water highquality CNTs can be produced in good yields [30,31]. Hydrocarbon precursors such as benzene, acetylene, and xylene to produce MWCNTs in high purity are not ideal for high-temperature synthesis.…”
Section: Role Of the Precursormentioning
confidence: 99%
“…Ultralong CNTs were produced with ethylene precursor using water and hydrogen [29]. By employing an appropriate choice of the carbon precursor and optimal feed rate of water highquality CNTs can be produced in good yields [30,31]. Hydrocarbon precursors such as benzene, acetylene, and xylene to produce MWCNTs in high purity are not ideal for high-temperature synthesis.…”
Section: Role Of the Precursormentioning
confidence: 99%
“…Some studies previously evidenced the effects of water on CNTs growth using various catalysts such as Fe 2 O 3, cobalt [17,18,21]. The role of water in purifying amorphous carbon is well documented [17,19,20]. Water is considered as a weak oxidant which removes the deposited amorphous carbon on the active sites of the catalyst [21].…”
Section: Effect Of Water Vapor During Cvd On Va-cntsmentioning
confidence: 99%
“…The water vapor helps protect the catalyst from ripening and/or carbide formation which would usually result in early termination of CNT growth. However, the effects of water on CNTs quality apparently differ with different catalysts and substrates [20,21]. So far, scarce information has been available with respect to the effects of water on CNTs growth using Fe 3 O 4 nanoparticles as catalyst.…”
Section: Introductionmentioning
confidence: 99%