Heterodyne grating interferometer based on a quasi-common-optical-path configuration for a two-degrees-of-freedom straightness measurement

Lee, Ju Yi; Hsieh, Hung Lin; Lerondel, Gilles; Déturche, Régis; Lu, Mini Pei; Chen, Jyh Chen

doi:10.1364/ao.50.001272

Cited by 17 publications

(9 citation statements)

References 25 publications

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“…For example, a common numerical aperture of 0.3 has an overlap angle of 10.6°. Such an overlap angle is much larger than those in the works of Lee et al and Hsieh et al [17,18]. Based on the momentum conservation, the three-dimensional diffraction equations can be written as follows [22]:…”

Section: Principlementioning

confidence: 99%

“…Many publications over the past decade have studied planar laser encoders [7][8][9][10][11][12][13][14][15][16][17][18][19][20]. Gao et al studied a series of surface encoders for measurement of in-plane X -and Ydisplacements as well as yaw and out-of-plane motions.…”

Section: Introductionmentioning

confidence: 99%

“…The corresponding measurement resolutions could be estimated to be 1.41 and 2.52 nm respectively. Lee et al also studied 2D QCOP for 2D displacement and straightness measurements [18]. It achieved a system resolution and stability of 1.3 nm and 40 nm, respectively, within a 30-min measurement.…”

Section: Introductionmentioning

confidence: 99%

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Common-path laser planar encoder

Chen

Liao

2013

Opt. Express

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This paper presents a common-path laser planar encoder (CLPE) for displacement measurements in the X- and Y- axes. The CLPE can effectively reduce the environmental disturbance to its lowest level. The experimental results of the CLPE match well with those of HP5529A for both short and long ranges. The CLPE can measure 2D displacement with high resolutions of 0.07 ± 0.021 nm and 0.07 ± 0.023 nm in the X- and Y- axes and also presents high system stabilities of -0.59 ± 0.43 nm/h and -0.63 ± 0.47 nm/h respectively in the X- and Y- axes. The CLPE has promising potential for nanometer resolution and large-range applications.

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Section: Principlementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Common-path laser planar encoder

Chen

Liao

2013

Opt. Express

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“…C. Lee et al proposed a six-degree-of-freedom measurement method by using a single unit of an optical encoder and discussed estimates of the uncertainties in terms of error sources [12,13]. J. Lee proposed a heterodyne grating interferometer for measuring two-dimensional straightness based on a quasi-common optical path (QCOP) [14]. On this basis, H. L. Hsieh proposed a new heterodyne laser interferometer with a six-degree-of-freedom measurement.…”

Section: Introductionmentioning

confidence: 99%

Compact Laser Collimation System for Simultaneous Measurement of Five-Degree-of-Freedom Motion Errors

et al. 2020

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A compact laser collimation system is presented for the simultaneous measurement of five-degree-of-freedom motion errors. The optical configuration of the proposed system is designed, and the principle of the measurement of five-degree-of-freedom errors is described in detail. The resolution of the roll and the horizontal straightness is doubled compared with other laser collimation methods. A common optical path compensation method is provided to detect light drift in real time and compensate for straightness and angle errors. An experimental setup is constructed, and a series of experiments are performed to verify the feasibility and stability of the system. Compared with commercial instruments, the pitch and yaw residuals are ± 2.5 ″ and ± 3.5 ″ without correction, and the residuals are ± 1.9 ″ and ± 2.8 ″ after correction, respectively. The comparison deviations of the horizontal straightness and vertical straightness changed from ± 4.8 μ m to ± 2.8 μm and ± 5.9 μm to ± 3.6 μm, respectively. The comparison deviation of the roll is ± 4.3 ″ . The experimental results show that the data of the five-degree-of-freedom measurement system obtained are largely the same as the measurement data of commercial instruments. The common optical path compensation can effectively improve the measurement accuracy of the system.

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“…The OD technique is able to provide the average value of the grating pitches, but it cannot provide the grating pitch uniformity that is a major factor directly determining the accuracy of metrology equipments, such as optical encoders [6][7][8]. The SPM technique can measure the profile at a high resolution, but it is time consuming and has a critical limited range.…”

Section: Introductionmentioning

confidence: 99%

Pitch evaluation of gratings based on a digital image correlation technique

Jia

Wei

et al. 2016

Optics Communications

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The digital image correlation (DIC) technique used for metrological grating evaluation is presented in this paper. A CCD camera is used to acquire the grating image, and the DIC technique together with the peak-position detection method is used to evaluate the grating pitches. The theoretical analysis and simulations are performed to confirm that the performance of our technique is as accurate as the Fourier transform (FT) technique, and is capable of noise resistance. As an example, the uniformity of the grating fabricated in our laboratory is measured using this method. The experimental results show that this grating has a peak-to-valley uniformity of 48 nm during a long range of 35 mm, and our technique has a higher repeatability than the FT technique in our measurement strategy. This work should be of great significance for the evaluation of metrological grating for optical encoders.

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Heterodyne grating interferometer based on a quasi-common-optical-path configuration for a two-degrees-of-freedom straightness measurement

Cited by 17 publications

References 25 publications

Common-path laser planar encoder

Common-path laser planar encoder

Compact Laser Collimation System for Simultaneous Measurement of Five-Degree-of-Freedom Motion Errors

Pitch evaluation of gratings based on a digital image correlation technique

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