1979
DOI: 10.1080/00337577908245983
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High current dosimetry techniques

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Cited by 23 publications
(2 citation statements)
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“…1(b) and (c), respectively. An additional planar suppressor plate is located in front of the conical suppressor, in accordance with McKenna's design [23]. This additional suppressor was dc biased as shown in Fig.…”
Section: B Faraday Cupmentioning
confidence: 97%
“…1(b) and (c), respectively. An additional planar suppressor plate is located in front of the conical suppressor, in accordance with McKenna's design [23]. This additional suppressor was dc biased as shown in Fig.…”
Section: B Faraday Cupmentioning
confidence: 97%
“…IBM [1][2][3][4], Western Electric [5] and Hughes are notable examples of early IDM involvement in implanter manufacture. In the early years of CMOS technology, integrated device manufacturers (IDMs) had a high degree of vertical integration with some even being involved in wafer and equipment fabrication.…”
Section: Evolutionary Trends and Ti's Development Modelmentioning
confidence: 99%