Articles you may be interested inMolecular beam epitaxy growth of metamorphic high electron mobility transistors and metamorphic heterojunction bipolar transistors on Ge and Ge-on-insulator/Si substrates J.Comparative studies of the epireadiness of 4 in. InP substrates for molecular-beam epitaxy growth Comparison of As-and P-based metamorphic buffers for high performance InP heterojunction bipolar transistor and high electron mobility transistor applications J. Vac. Sci. Technol. B 22, 1565 (2004); 10.1116/1.1691412 Study of direct current characteristics of carbon-doped GaInP/GaAs heterojunction bipolar transistor grown by solid source molecular beam epitaxyIn this article we present results from heterojunction bipolar transistor ͑HBT͒ devices that were designed for low power consumption by taking advantage of the small bandgap of high-indium composition In 0.86 Ga 0.14 As in the base layer. These were grown by solid-source molecular-beam epitaxy. Both single-and double-HBT devices were grown and fabricated. The 6.00 Å lattice parameter of these device structures was accommodated by first growing metamorphic, relaxed, linearly graded In x Al 1Ϫx As buffers on semi-insulating InP substrates, grading from In 0.52 Al 0.48 As lattice-matched with InP at 5.87 Å to In 0.86 Al 0.14 As at 6.00 Å. The total thickness of each buffer was 1.2 m or greater. These graded buffer layers developed the crosshatched morphology that is associated with the strain-relaxation process. The density of threading dislocations reaching the buffer surface was measured by EPD to be as low as 2ϫ10 6 cm Ϫ2 . Although this density is still more than an order of magnitude greater than that measured for lattice-matched material on InP, these 6.00 Å HBT devices exhibited good electrical characteristics. For these electrical tests, both large ͑70ϫ70 m 2 ͒ and small ͑1.5ϫ10 or 2ϫ10 m 2 ͒ devices were fabricated. All devices exhibited significantly lower turn-on and knee voltages compared to the GaAs and lattice-matched In 0.52 Ga 0.48 As-on-InP HBT technologies. The 6.00 Å single HBT demonstrated a V BE ϳ0.4 V for operation at 1 mA compared to 0.7 V for lattice-matched In 0.52 Ga 0.48 As on InP and 1.3 V for GaAs. The 6.00 Å HBT approach additionally benefits from a favorable valence band alignment between the p-type In 0.86 Ga 0.14 As base and the n-type In 0.86 Al 0.14 As emitter, which reduces hole injection into the emitter and increases device current gain. The rf measurements of this structure exhibited a transistor cut-off frequency f T exceeding 100 GHz. Small double-HBT devices presented a breakdown voltage BV CEO Ͼ2 V, which was twice that of small single-HBT devices. This enables further vertical scaling of the device to reduce the collector transit time.