High resolution wide range pressure sensor using hexagonal ring and micromachined cantilever tips on 2D silicon photonic crystal

Ghosh, Rajib R.; Ghosh, Kushankur; Chakraborty, Rajib

doi:10.1016/j.optcom.2018.09.016

Cited by 16 publications

(4 citation statements)

References 28 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…A 2D hexagonal lattice structured PhC design was proposed for pressure sensing purposes in 2019. 147 The structure has the capability of sensing a broad range of pressures, from 20 MPa to 10 GPa. To increase the sensitivity of the structure hexagonal-shaped ring with a hexagonal lattice structure is used.…”

Section: Phc-based Sensorsmentioning

confidence: 99%

See 1 more Smart Citation

Fabrication techniques and applications of two-dimensional photonic crystal: history and the present status

2022

View full text Add to dashboard Cite

The idea of photonic crystal came to be when E. Yablonovitch and S. John recommended a structure in 1987 having periodic alteration of refractive index in one or multiple directions. Photonic crystals have the potential to manipulate and tailor the flow of light across the crystal, which gives advantage to invent many photonic devices on the microscopic scale having very small footprints. In recent years several articles have been published on the advances of photonic crystal-based structures. This review article mainly focuses on the several fabrication techniques of photonic crystals and their applications in different fields. Several photonic crystalbased structures such as logic gates, optical sensors, polarization beam splitters, and absorbers for solar cells are reviewed in this paper to show recent advancements on this trending topic. Also, a brief review of the different steps of fabrication of photonic crystals and different fabrication methods proposed by researchers is articulated in this paper.

show abstract

Section: Phc-based Sensorsmentioning

confidence: 99%

“…A 2D hexagonal lattice structured PhC design was proposed for pressure sensing purposes in 2019 147 . The structure has the capability of sensing a broad range of pressures, from 20 MPa to 10 GPa.…”

Section: Applications Of Phcmentioning

confidence: 99%

Fabrication techniques and applications of two-dimensional photonic crystal: history and the present status

2022

View full text Add to dashboard Cite

show abstract

“…The concept of using a microcantilever tip is to get a wide range of pressure. The pressure was applied from 1 to 10 Mpa with a resolution of 10 MPa ( 36 , 38 ). The hexagonal ring resonator has shown better sensitivity up to 250 nm/MPa.…”

Section: Type Of Optical Mems Sensors With Applicationmentioning

confidence: 99%

A Comprehensive Review on the Optical Micro-Electromechanical Sensors for the Biomedical Application

Upadhyaya

Hasan

Abdel‐Khalek

et al. 2021

Front. Public Health

View full text Add to dashboard Cite

This study presented an overview of current developments in optical micro-electromechanical systems in biomedical applications. Optical micro-electromechanical system (MEMS) is a particular class of MEMS technology. It combines micro-optics, mechanical elements, and electronics, called the micro-opto electromechanical system (MOEMS). Optical MEMS comprises sensing and influencing optical signals on micron-level by incorporating mechanical, electrical, and optical systems. Optical MEMS devices are widely used in inertial navigation, accelerometers, gyroscope application, and many industrial and biomedical applications. Due to its miniaturised size, insensitivity to electromagnetic interference, affordability, and lightweight characteristic, it can be easily integrated into the human body with a suitable design. This study presented a comprehensive review of 140 research articles published on photonic MEMS in biomedical applications that used the qualitative method to find the recent advancement, challenges, and issues. The paper also identified the critical success factors applied to design the optimum photonic MEMS devices in biomedical applications. With the systematic literature review approach, the results showed that the key design factors could significantly impact design, application, and future scope of work. The literature of this paper suggested that due to the flexibility, accuracy, design factors efficiency of the Fibre Bragg Grating (FBG) sensors, the demand has been increasing for various photonic devices. Except for FBG sensing devices, other sensing systems such as optical ring resonator, Mach-Zehnder interferometer (MZI), and photonic crystals are used, which still show experimental stages in the application of biosensing. Due to the requirement of sophisticated fabrication facilities and integrated systems, it is a tough choice to consider the other photonic system. Miniaturisation of complete FBG device for biomedical applications is the future scope of work. Even though there is a lot of experimental work considered with an FBG sensing system, commercialisation of the final FBG device for a specific application has not been seen noticeable progress in the past.

show abstract

“…They reported an increase in the width of the photonic gap by augmenting triangle lengths, accompanied by a shift to high frequencies when the pressure increased. Recently, the effects of pressure on 2D-PC with a hexagonal lattice have become relevant for designing pressure sensors in megapascal to gigapascal operability ranges [23].…”

Section: Introductionmentioning

confidence: 99%

Effects of hydrostatic pressure on an L1 and L3 cavity of a photonic slab

Segovia-Chaves

Vinck-Posada

2020

Mater. Res. Express

View full text Add to dashboard Cite

In this work, we used the guided-mode expansion method to calculate the photonic band dispersion in two-dimensional photonic crystal slabs. The photonic lattice is hexagonal, composed of air holes with a circular cross-section. The slab is made of a semiconductor material (GaAs) with a dielectric function dependent on pressure and temperature. By maintaining the constant temperature, we found a shift in the photonic band dispersion towards regions of larger frequencies when the hydrostatic pressure increased. Moreover, we consider the effects of pressure on defective modes in cavities L1 and L3. The results reveal that by increasing the pressure, the position of the defective modes manages to tune for the photonic gap. Additionally, we found a decrease in the Q-factor for the L1 cavity when the pressure increases. However, for the L3 cavity, the Q-factor exhibits a non-monotonous behavior by increasing the pressure.

show abstract

High resolution wide range pressure sensor using hexagonal ring and micromachined cantilever tips on 2D silicon photonic crystal

Cited by 16 publications

References 28 publications

Fabrication techniques and applications of two-dimensional photonic crystal: history and the present status

Fabrication techniques and applications of two-dimensional photonic crystal: history and the present status

A Comprehensive Review on the Optical Micro-Electromechanical Sensors for the Biomedical Application

Effects of hydrostatic pressure on an L1 and L3 cavity of a photonic slab

Contact Info

Product

Resources

About