2010
DOI: 10.1039/b923377f
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High-speed multiphoton absorption polymerization: fabrication of microfluidic channels with arbitrary cross-sections and high aspect ratios

Abstract: We demonstrate the use of high-speed, multiphoton absorption polymerization (MAP) for the fabrication of large-area microfluidic master structures. High-speed fabrication in SU8 without laser-induced damage is made possible by the use of a novel photoacid generator with a high two-photon-absorption cross-section. Master structures fabricated with MAP can be used to produce polydimethylsiloxane microchannels with high aspect ratios and/or arbitrary cross-sections. Microchannels with different cross-sections and… Show more

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Cited by 127 publications
(82 citation statements)
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“…Processes related to two-photon absorption (2PA) have attracted attention in recent years owing to diverse applications in various fields, such as photodynamic therapy [1,2], optical-limiting [3][4][5], optical data storage [6,7], upconversion lasing [8,9], 3D microfabrication [10,11] and two-photon excited fluorescence microscopy [12,13]. 2PA occurs when molecules are exposed to intense laser pulses.…”
Section: Introductionmentioning
confidence: 99%
“…Processes related to two-photon absorption (2PA) have attracted attention in recent years owing to diverse applications in various fields, such as photodynamic therapy [1,2], optical-limiting [3][4][5], optical data storage [6,7], upconversion lasing [8,9], 3D microfabrication [10,11] and two-photon excited fluorescence microscopy [12,13]. 2PA occurs when molecules are exposed to intense laser pulses.…”
Section: Introductionmentioning
confidence: 99%
“…It is a negative-tone resist consisting of epoxy oligomers and a low concentration of a photoacid generator (PAG). J. T. Fourkas et al have developed the fabrication of microfluidic channels with arbitrary cross sections and high aspect ratios [23]. The authors demonstrate that by employing a novel PAG in an SU8 resist for MPP, high-aspect-ratio masters with uniform, rectangular cross sections can be produced.…”
Section: Multiphoton Polymerizationmentioning
confidence: 97%
“…Scale bars are 100 μm. Reproduced from [23] by permission of the Royal Society of Chemistry micromachine that may be placed in blood vessels for health care. Therefore, it is of great importance to find novel fabricative and driven techniques for making functional micro/nanomachines with precise motion control.…”
Section: Multiphoton Polymerizationmentioning
confidence: 99%
“…Cationic photoresists are typifi ed by epoxies, such as SU-8 (Kumi et al , 2010;Witzgall et al , 1998). Cationic polymerization in MAP begins with the excitation of photoacid generator (PAG).…”
Section: © Woodhead Publishing Limited 2012mentioning
confidence: 99%