2009 IEEE International Electron Devices Meeting (IEDM) 2009
DOI: 10.1109/iedm.2009.5424411
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Highly scalable hafnium oxide memory with improvements of resistive distribution and read disturb immunity

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Cited by 187 publications
(107 citation statements)
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“…The signals need to reach M1 or M2 from the memristor layer only when they access the pins of logic blocks. Moreover, as stated in Section I, the size of a memristor cell can be close to or even smaller than the width of a metal wire [9,10]. So memristors can easily fit into the design in Fig.…”
Section: A Basic Structurementioning
confidence: 99%
See 1 more Smart Citation
“…The signals need to reach M1 or M2 from the memristor layer only when they access the pins of logic blocks. Moreover, as stated in Section I, the size of a memristor cell can be close to or even smaller than the width of a metal wire [9,10]. So memristors can easily fit into the design in Fig.…”
Section: A Basic Structurementioning
confidence: 99%
“…The current leading memristor technology for the time being has outperformed many other emerging NVMs in some important aspects and performs similar to them in the other aspects. It has been demonstrated that memristor is scalable below 30nm [9], can be fabricated with device size as small as F 2 (F is the feature size) with full compatibility of CMOS [10], and can be programmed within 5ns at 180nm technology node [11]. Due to the advantages of its device property over SRAM and other emerging NVMs, numerous research efforts have been made to adopt memristors for systemlevel integration [12][13][14][15].…”
Section: Introductionmentioning
confidence: 99%
“…The filament-type RRAM has demonstrated high switching speeds (of the order of GHz), large R On /R Off ratio (>10 7 ), low operation voltages (<1 V) and low switching currents (of the order of nanoamperes) [4,8,26]. However, its endurance, retention and uniformity performances have been facing great challenges [1,2].…”
Section: Performance Improvement Approaches To Filament-type Rrammentioning
confidence: 99%
“…As for VCM-based RRAM, the material of the buffer layer is usually oxidizable metal or metal oxide, such as Ti or TiO 2 , which is as thin as several nanometers [24][25][26]. The reason for using such a buffer layer is as follows: for this type of RRAM, the filament formation and rupture are associated with the distribution of movable oxygen ions and oxygen vacancies in the oxide films, and such an oxidizable buffer layer can be considered as the oxygen reservoir to help stabilize the local oxygen migration for the filament formation and rupture (the role is similar to that of the reactive metal electrode discussed previously).…”
Section: Interface Engineeringmentioning
confidence: 99%
“…It is because the number of partially-connected CFs decreases in a pristine cell as initial defect density is reduced. Considering that the number of initial defects decreases with the reduction of cell volume, more uniform V foming distribution is expected in the case of a small-sized RRAM cell [19].…”
Section: Applicationsmentioning
confidence: 99%