1991
DOI: 10.1109/16.75168
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Impact of surrounding gate transistor (SGT) for ultra-high-density LSI's

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Cited by 158 publications
(65 citation statements)
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“…Undoped channel MOSFET's with double gate [22], surrounding gate [23], and Schottky source and drain [24] have been proposed primarily to suppress short channel effects in devices scaled to decanano dimensions. Simulations predict that such devices will remain operational to channel lengths below 10 nm [24], [25] and hence may provide a solution to the problem of dopant fluctuations once and for all.…”
Section: Fluctuation-resistant Architecturesmentioning
confidence: 99%
“…Undoped channel MOSFET's with double gate [22], surrounding gate [23], and Schottky source and drain [24] have been proposed primarily to suppress short channel effects in devices scaled to decanano dimensions. Simulations predict that such devices will remain operational to channel lengths below 10 nm [24], [25] and hence may provide a solution to the problem of dopant fluctuations once and for all.…”
Section: Fluctuation-resistant Architecturesmentioning
confidence: 99%
“…Compared with conventional planar MOSFETs, SGTs have several superior characteristics such as high packing density, high current drive capability, and immunity to the short channel effect [1][2][3][4][5][6]. In a cylindrical/surrounding gate MOSFET (CGT/SGT), a rectangular-shaped silicon core in the original SGT has been replaced with a cylindrical silicon core (pillar).…”
Section: Introductionmentioning
confidence: 99%
“…In addition, the area occupied by the vertical FETs is smaller than that occupied by planar FETs (31). Takato et al were the first to describe the idea of and demonstrate of surrounding-gate transistors (SGTs) (32).…”
Section: Quality Of Metal-oxide-semiconductor (Mos) and Gate Architecmentioning
confidence: 99%