“…Over the last two decades, microelectromechanical systems (MEMS) micropumps have been developed for broad biomedical and biological applications (Laser and Santiago 2004). A subset of these pumps address requirements for implantable drug delivery systems including biocompatibility, reliable operation (precise and accurate flow control), low power consumption, low heat generation, large driving force, and compatibility with a large variety of new and conventional drugs (Geipel, Goldschmidtb et al 2008; Tang, Smith et al 2008; Amirouche, Yu et al 2009). However, the emphasis has been on continuous pumping.…”