In-plane spectroscopy of microfluidic systems made in photosensitive glass

Tantawi, Khalid; Gaillard, William R.; Helton, J.S.; Waddell, Emanuel; Mirov, Sergey; Fedorov, Vladimir V.; Williams, John D.

doi:10.1007/s00542-012-1626-6

Cited by 3 publications

(1 citation statement)

References 26 publications

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“…Conversely, post bake annealing of photosensitive glasses such as Foturan R and APEX TM reduce surface roughness providing transparent glass devices with high aspect ratios at the microscale [6][7][8][9][10][11]. These new glass processing technologies allow for chemically inert and multilayered or stacked microfluidic devices to be developed with in-plane observation capabilities [12]. Thus, photosensitive glasses are preferred over PDMS or silicon for cases where low cost batch fabrication, optical transparency, reusability, and high chemical resistance, are required.…”

Section: Introductionmentioning

confidence: 99%

In-plane spectroscopy with optical fibers and liquid-filled APEX™ glass microcuvettes

Gaillard

Tantawi

Waddell

et al. 2013

J. Micromech. Microeng.

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Chemical etching and laser drilling of microstructural glass results in opaque or translucent sidewalls, limiting the optical analysis of glass microfluidic devices to top down or non-planar topologies. These non-planar observation topologies prevent each layer of a multilayered device from being independently optically addressed. However, novel photosensitive glass processing techniques in APEX™ have resulted in microfabricated glass structures with transparent sidewalls. Toward the goal of a transparent multilayered glass microfluidic device, this study demonstrates the ability to perform spectroscopy with optical fibers and microcuvettes fabricated in photosensitive APEX™ glass.

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