2019
DOI: 10.7567/1347-4065/ab07a4
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Indium incorporation in quaternary In x Al y Ga1−xy N for UVB-LEDs

Abstract: Consistent studies of the quaternary composition are rare as it is impossible to fully determine the quaternary composition by X-ray diffraction or deduce it from that of ternary alloys. In this paper we determined the quaternary composition by wavelength dispersive X-ray spectroscopy of In x Al y-Ga N x y 1 layers grown by metal organic vapor phase epitaxy. Further insights explaining the peculiarities of In x Al y Ga 1−x−y N growth in a showerhead reactor were gained by simulations of the precursor decomposi… Show more

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Cited by 5 publications
(2 citation statements)
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“…Also, the Al/In ratio in InAlGaN is found to be 4.88 for the latticematched InAlGaN/GaN heterojunction [24]. Considering the actual epitaxial growth of InAlGaN material [25,26], quaternary InAlGaN alloys nearly lattice-matched to GaN with y = 0.05, y = 0.06, y = 0.09 are selected as barriers in order to investigate the deep-level working mechanism of near latticematched InAlGaN/GaN RTDs. Table 1 lists the basic material parameters needed in numerical simulation.…”
Section: Device Structure and Simulation Parametersmentioning
confidence: 99%
“…Also, the Al/In ratio in InAlGaN is found to be 4.88 for the latticematched InAlGaN/GaN heterojunction [24]. Considering the actual epitaxial growth of InAlGaN material [25,26], quaternary InAlGaN alloys nearly lattice-matched to GaN with y = 0.05, y = 0.06, y = 0.09 are selected as barriers in order to investigate the deep-level working mechanism of near latticematched InAlGaN/GaN RTDs. Table 1 lists the basic material parameters needed in numerical simulation.…”
Section: Device Structure and Simulation Parametersmentioning
confidence: 99%
“…Sample A3 was grown on an AlN ELO structure with dislocation density of less than 2 × 10 9 cm −2 . For all samples of series A, the next layers are Al 0.35 Ga 0.65 N:Si with ≈ 6 µm (1.5 µm in case of A3), 3 QWs having nominal well and barrier compositions of In 0.02 Al 0.22 Ga 0.76 N/Al 0.30 Ga 0.70 N. 13 Samples A1 and A3 have 2 nm (sample A2 4 nm) thick QWs. The topmost layer consists Sample B is very similar to sample A1.…”
mentioning
confidence: 99%