Influence of ion beam parameters onto two-dimensional optical thin film thickness distributions deposited by ion beam sputtering

Sakiew, Wjatscheslaw; Schrameyer, Stefan; Jupé, Marco; Schwerdtner, Philippe; Erhart, Nick; Starke, K.; Ristau, Detlev

doi:10.1016/j.tsf.2019.05.027

Cited by 7 publications

(1 citation statement)

References 18 publications

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“…The measured thickness of Au@GF/PVDF pressed by 0 MPa, 2 MPa, 4 MPa, and 6 MPa are 55 ± 5, 40 ± 3, 35 ± 3, and 33 ± 3 µm, respectively. Because of the excessively low content of Au NPs that cannot be measured, the content of Au NPs can be roughly calculated based on formulas of sputtered layer thickness (D) and mass (M) [22]:…”

Section: Preparation Of Au@gf/pvdf 0-3-3 Composites and Pure Pvdf Filmsmentioning

confidence: 99%

Remarkably enhancing dielectric permittivity and suppressing loss of PVDF via incorporating metal nanoparticles decorated glass fibers

Zhu,

Yang,

et al. 2024

J. Phys. D: Appl. Phys.

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Dielectrics with high permittivity and low dielectric loss have so far received considerable attention because of their wide applications in various electronic devices. However, the enhanced permittivity of dielectrics is always accompanied by an increase in loss. In this work, targeting at enhancing the permittivity of poly(vinylidene fluoride) (PVDF) without elevating loss, gold nanoparticles (Au NPs) decorated glass fibers (GF) are incorporated into the PVDF, forming a unique design of Au@GF/PVDF composites. The effects of gold nanoparticle content, calcination temperature, and hot-pressing pressure on the dielectric properties are studied. Interestingly, for the composite with gold sputtering time of 3 min, a remarkable dielectric enhancement of 430% (i.e. from 7.8 to 33.5 at 10 kHz) along with an obvious loss suppression of 56% (i.e. from 0.0353 to 0.0198) are concurrently achieved. It is believed that, the increase in permittivity is mainly attributed to the Maxwell–Wagner–Sillars effect of effective micro-capacitors and cluster polarization of gold nanoparticles while the suppressed loss is originated from the intrinsic low loss of GF and the Coulomb-blockade effect of gold nanoparticles. This work offers a promising strategy to simultaneously enhance the permittivity and suppress the loss of dielectric materials.

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Section: Preparation Of Au@gf/pvdf 0-3-3 Composites and Pure Pvdf Filmsmentioning

confidence: 99%

Remarkably enhancing dielectric permittivity and suppressing loss of PVDF via incorporating metal nanoparticles decorated glass fibers

Zhu,

Yang,

et al. 2024

J. Phys. D: Appl. Phys.

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Investigation into the effect of substrate material on microstructure and optical properties of thin films deposited via magnetron sputtering technique

Asl

Nemati

Hadi

et al. 2022

Ceramics International

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Target erosion process during broad ion beam sputtering using 3D modeling of ion trajectories

Sakiew¹,

Klocke²,

Ristau

2022

AIP Advances

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Understanding the distribution of particles sputtered from a target requires an appreciation of how ions impinge on the target. In pursuit of this goal, a fully three-dimensional model of the ion trajectories in a broad ion beam, assuming full space charge compensation, Gaussian emission characteristics of the beamlets, and beamlet deflection, was constructed. The modeled ion trajectories were used to simulate target erosion, enabling a comparison between the modeled erosion and the experimental erosion. The focus was on Ar and Xe ion species at ion energies in the range of 1.4–1.9 keV and on target materials, Si, Ta, and SiO2. Conclusions were drawn on the erosion process, the potential radial inhomogeneity of the plasma in the discharge chamber of the ion source, and on the opening angle of the emission characteristics of the beamlets. For the investigated process and an applied target tilt angle of 55°, the model verified that material-specific and angle-dependent ion–solid interaction mechanisms at the atomic level played only a minor role in the target’s macroscopic surface modification in the context of the qualitative distribution of the erosion profile. In contrast, the applied sputtering geometry played a significant role.

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Influence of ion beam parameters onto two-dimensional optical thin film thickness distributions deposited by ion beam sputtering

Cited by 7 publications

References 18 publications

Remarkably enhancing dielectric permittivity and suppressing loss of PVDF via incorporating metal nanoparticles decorated glass fibers

Remarkably enhancing dielectric permittivity and suppressing loss of PVDF via incorporating metal nanoparticles decorated glass fibers

Investigation into the effect of substrate material on microstructure and optical properties of thin films deposited via magnetron sputtering technique

Target erosion process during broad ion beam sputtering using 3D modeling of ion trajectories

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