ASME/JSME 2011 8th Thermal Engineering Joint Conference 2011
DOI: 10.1115/ajtec2011-44421
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Infrared Imaging Microscope as an Effective Tool for Measuring Thermal Resistance of Emerging Interface Materials

Abstract: The reduction of interfacial resistance continues to be a significant challenge in thermal management of semiconductor and other microscale devices. Current state-of-the-art thermal interface materials (TIMs) have resistances in the range of 5–10 mm2·K/W. At these values, particularly for the emerging highly nonhomogeneous materials, standard measurement techniques often fail to provide accurate results. This paper describes the use of infrared microscopy for measuring the total thermal resistance across multi… Show more

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Cited by 17 publications
(6 citation statements)
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“…Substantial developments in metrology over the past few decades have allowed quantification of the thermal properties of the individual materials comprising the device (ranging from the silicon device layer to thermal interface materials and packaging materials), interface thermal resistances between materials, and spatial mapping of deviceand package-level temperatures, all of which are crucial for predicting and understanding thermal transport within microelectronic devices. A range of techniques including the thermoreflectance [143][144][145][146], infrared microscopy [147][148][149], 3ω and related techniques Downloaded by [New York University] at 07: 56 12 June 2015 [150], and photoacoustic methods [151] have contributed strongly to the precise measurement of these properties. These methods have demonstrated the effective reduction of the thermal conductivity of silicon at the nanoscale, when the feature size [152] or the dimensions of the hot spot [153] are on the order of the phonon mean free path.…”
Section: Thermal Management Of Microelectronicsmentioning
confidence: 99%
“…Substantial developments in metrology over the past few decades have allowed quantification of the thermal properties of the individual materials comprising the device (ranging from the silicon device layer to thermal interface materials and packaging materials), interface thermal resistances between materials, and spatial mapping of deviceand package-level temperatures, all of which are crucial for predicting and understanding thermal transport within microelectronic devices. A range of techniques including the thermoreflectance [143][144][145][146], infrared microscopy [147][148][149], 3ω and related techniques Downloaded by [New York University] at 07: 56 12 June 2015 [150], and photoacoustic methods [151] have contributed strongly to the precise measurement of these properties. These methods have demonstrated the effective reduction of the thermal conductivity of silicon at the nanoscale, when the feature size [152] or the dimensions of the hot spot [153] are on the order of the phonon mean free path.…”
Section: Thermal Management Of Microelectronicsmentioning
confidence: 99%
“…A selected bibliography of NTI team publications is included in this paper [31][32][33][34][35][36][37].…”
Section: Nano Thermal Interfaces (Nti)mentioning
confidence: 99%
“…The total thermal resistance across the Si/VACNT/Cu was measured using an infrared (IR) thermal imaging setup [35]. The system used is Infrascope II IR Microscope which produces a temperature map of 256 × 256 pixels with a spatial resolution up to 3 µm and a temperature sensitivity of 0.1°C.…”
Section: Thermal Resistance Measurement Of Si/vacnt/cumentioning
confidence: 99%