1997
DOI: 10.1049/el:19970834
|View full text |Cite
|
Sign up to set email alerts
|

Inhomogeneous thin film optical filters fabricatedusing glancing angle deposition

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
3
1
1

Citation Types

0
16
0
1

Year Published

2003
2003
2020
2020

Publication Types

Select...
4
4
1

Relationship

0
9

Authors

Journals

citations
Cited by 54 publications
(17 citation statements)
references
References 1 publication
0
16
0
1
Order By: Relevance
“…This technique has been used in various applications in optical and semiconductor devices. [59][60][61][62][63][64][65][66][67][68][69][70][71][72][73] …”
Section: B Glancing-angle Depositionmentioning
confidence: 99%
“…This technique has been used in various applications in optical and semiconductor devices. [59][60][61][62][63][64][65][66][67][68][69][70][71][72][73] …”
Section: B Glancing-angle Depositionmentioning
confidence: 99%
“…GLAD and related techniques such as sculptured thin films (STFs) 21,22 have been demonstrated in experimental and modelling studies for a range of optical devices such as rugate filters 23,24 and Šolc filters 25 , among many other envisioned applications.…”
Section: Relevant Optical Studiesmentioning
confidence: 99%
“…Thin films with nanostructures were fabricated based on OAD from various materials, including Cu, Fe, Al, Y 2 O 3 , TiO 2 , MgF 2 , C, Si, and ZnS [11][12][13][14][15][16][17][18]. The films exhibit low stress, a high surface area, and intrinsically anisotropic physical properties such as dichroism, birefringence, and anisotropic resistivity [19,20].…”
Section: Introductionmentioning
confidence: 99%