Integrated Optomechanical Displacement Sensor Based on a Photonic Crystal Cavity

Galeotti, Federico; Sersic-Vollenbroek, Ivana; Petruzzella, Maurangelo; Pagliano, Francesco; Zobenica, Ž.; Otten, F. W. M. van; Marnani, H. Sadeghian; Heijden, Rob van der; Fiore, Andrea

doi:10.1109/omn.2018.8454635

Cited by 4 publications

(2 citation statements)

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“…Displacement sensitivity and imprecision are expected to be improved significantly by enhancing the optical coupling efficiency through using an optical fiber instead of the objective to couple light into the waveguide. For the practical AFM applications some further steps are needed: a sharp dielectric tip can be grown on top of the cantilever using focused ion beam 24 , and the chip needs to be packaged into a holder with piezo motors to scan the sample. In this paper we have shown measurements in vacuum, and driving the actuator at atmospheric pressure will take a higher power due to the air damping.…”

Section: Discussionmentioning

confidence: 99%

Integrated nano-optomechanical displacement sensor with ultrawide optical bandwidth

et al. 2020

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Optical read-out of motion is widely used in sensing applications. Recent developments in micro- and nano-optomechanical systems have given rise to on-chip mechanical sensing platforms, potentially leading to compact and integrated optical motion sensors. However, these systems typically exploit narrow spectral resonances and therefore require tuneable lasers with narrow linewidth and low spectral noise, which makes the integration of the read-out extremely challenging. Here, we report a step towards the practical application of nanomechanical sensors, by presenting a sensor with ultrawide (∼80 nm) optical bandwidth. It is based on a nanomechanical, three-dimensional directional coupler with integrated dual-channel waveguide photodiodes, and displays small displacement imprecision of only 45 fm/Hz1/2 as well as large dynamic range (>30 nm). The broad optical bandwidth releases the need for a tuneable laser and the on-chip photocurrent read-out replaces the external detector, opening the way to fully-integrated nanomechanical sensors.

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Section: Discussionmentioning

confidence: 99%

Integrated nano-optomechanical displacement sensor with ultrawide optical bandwidth

et al. 2020

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“…The microcantilever has received increasing attention in the field of biological and chemical sensing due to a tiny sensor area, a label-less detection method, lowcost fabrication and mass production and compatibility with CMOS (complementary metal-oxide semiconductor) technology. [1][2][3][4][5][6][7] The microcantilever sensor is carried out by reading out the displacement of a cantilever under a stress generated on its surface. There are many types of readout methods.…”

Section: Introductionmentioning

confidence: 99%

Integrated opto‐mechanical cantilever sensor with a rib waveguide

Zhang

Fan

et al. 2022

Journal of Microscopy

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An integrated opto-mechanical cantilever sensor with a rib waveguide is reported in this paper. The device consists of a rib waveguide cantilever with buried waveguides on silicon. The rib cantilever is introduced to match better with the buried waveguide, further for increasing the interface coupling efficiency. With this configuration, single-mode operating can be achieved in transverse direction without decreasing the width of optical waveguide cantilever. The system sensitivity is 1.1 μm -1 which is increased by about 21%, compared with the conventional structure.

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Design and analysis of moems based displacement sensor for detection of muscle activity in human body

Sharan

Sandhya

Barya³

et al. 2020

Int. j. inf. tecnol.

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Integrated Optomechanical Displacement Sensor Based on a Photonic Crystal Cavity

Cited by 4 publications

References 5 publications

Integrated nano-optomechanical displacement sensor with ultrawide optical bandwidth

Integrated nano-optomechanical displacement sensor with ultrawide optical bandwidth

Integrated opto‐mechanical cantilever sensor with a rib waveguide

Design and analysis of moems based displacement sensor for detection of muscle activity in human body

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